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Journal ArticleDOI

Machine-Learning-Based Hotspot Detection Using Topological Classification and Critical Feature Extraction

TLDR
This work utilizes feedback learning and present redundant clip removal to reduce the false alarm and outperforms the 2012 CAD contest at International Conference on Computer-Aided Design (ICCAD) winner on accuracy and false alarm.
Abstract
Because of the widening sub-wavelength lithography gap in advanced fabrication technology, lithography hotspot detection has become an essential task in design for manufacturability. Unlike current state-of-the-art works, which unite pattern matching and machine-learning engines, we fully exploit the strengths of machine learning using novel techniques. By combing topological classification and critical feature extraction, our hotspot detection framework achieves very high accuracy. Furthermore, to speed-up the evaluation, we verify only possible layout clips instead of full-layout scanning. We utilize feedback learning and present redundant clip removal to reduce the false alarm. Experimental results show that the proposed framework is very accurate and demonstrates a rapid training convergence. Moreover, our framework outperforms the 2012 CAD contest at International Conference on Computer-Aided Design (ICCAD) winner on accuracy and false alarm.

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Citations
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Journal ArticleDOI

Imbalance aware lithography hotspot detection: a deep learning approach

TL;DR: A deep convolutional neural network that targets representative feature learning in lithography hotspot detection and achieves comparable or better performance on the ICCAD 2012 contest benchmark compared to state-of-the-art hotspot detectors based on deep or representative machine leaning.
Proceedings ArticleDOI

Enabling online learning in lithography hotspot detection with information-theoretic feature optimization

TL;DR: A unified machine learning based hotspot detection framework, where feature extraction and optimization is guided by an information-theoretic approach and solved by a dynamic programming model, which can be naturally extended to online learning scenario.
Proceedings ArticleDOI

Layout Hotspot Detection with Feature Tensor Generation and Deep Biased Learning

TL;DR: A deep learning framework for high performance and large scale hotspot detection is developed and a biased learning algorithm is proposed to train the convolutional neural network to further improve detection accuracy with small false alarm penalties.
Proceedings ArticleDOI

Machine-learning-based hotspot detection using topological classification and critical feature extraction

TL;DR: By combing topological classification and critical feature extraction, this hotspot detection framework achieves very high accuracy and outperforms the 2012 CAD Contest at ICCAD winner on accuracy and false alarm.
Journal ArticleDOI

Online UAV-Mounted Edge Server Dispatching for Mobile-to-Mobile Edge Computing

TL;DR: A novel online unmanned aerial vehicle (UAV)-mounted edge server dispatching scheme is proposed to provide flexible mobile-to-MEC services and can serve more user equipments (UEs) as well as achieve a high resource utilization.
References
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Proceedings ArticleDOI

ICCAD-2012 CAD contest in fuzzy pattern matching for physical verification and benchmark suite

TL;DR: This contest is aimed to provide a suite of layouts which highlight the challenges of this application: Widely different classes, limited amount of data and low prediction rates.
Proceedings ArticleDOI

Accurate process-hotspot detection using critical design rule extraction

TL;DR: This paper proposes an accurate process-hotspot detection framework that extracts only critical design rules to express the topological features of hotspot patterns and adopts a two-stage filtering process to locate all hotspots accurately and efficiently.
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