Open Access
MEMS-based nanotechnology
Henricus V. Jansen,Niels Roelof Tas,Johan W. Berenschot +2 more
- pp 163-275
About:
The article was published on 2004-01-01 and is currently open access. It has received 5 citations till now. The article focuses on the topics: Impact of nanotechnology & Nanobiotechnology.read more
Citations
More filters
Journal ArticleDOI
Sub-10nm silicon ridge nanofabrication by advanced edge lithography for NIL applications
TL;DR: In this paper, a nanofabrication scheme is presented to form stamps useful in thermal nano-imprint lithography (T-NIL), which is created in single crystalline silicon using a full-wet etching procedure including local oxidation of silicon (LOCOS) and employing an adapted edge lithography technique on top of conventional photolithography.
Journal ArticleDOI
Fabrication of a silicon oxide stamp by edge lithography reinforced with silicon nitride for nanoimprint lithography
Yiping Zhao,Erwin Berenschot,Meint J. de Boer,Henri Jansen,Niels Roelof Tas,Jurriaan Huskens,Miko Elwenspoek +6 more
TL;DR: In this paper, the fabrication of a stamp reinforced with silicon nitride is presented for its use in nanoimprint lithography, which is based on edge lithography using conventional optical lithography and wet anisotropic etching of 110 silicon wafers.
Book ChapterDOI
Chemical and physical vapor deposition methods for nanocoatings
Igor Shishkovsky,P.N. Lebedev +1 more
TL;DR: In this article, a comprehensive analysis of vacuum deposition methods for the production of nanocoatings and functionally graded (FG) multilayers is provided, which is generally based on a paradigm of the type connectivity of the internal structure.
DissertationDOI
High-resolution stamp fabrication by edge lithography
TL;DR: In this article, the authors presented the idea of reinforcing the SiO2 nanoridges by an additional SiNx deposition to make the stamps reusable in T-NIL; however, the over-deposition led to the loss of sub-20 nm resolution.
Dissertation
Fabrication of acoustically micropatterned coacervate-based hydrogels
TL;DR: The central theme of this thesis is to exploit the non-contact technique of acoustic trapping for the manipulation of complex coacervate microdroplets in the construction of micropatterned hydrogels and gelatinous films for biological applications.