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Method and apparatus for smoothing thin conductive films by gas cluster ion beam

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TLDR
In this paper, a method and apparatus is proposed to facilitate the successful and precise smoothing of conductive films on insulating films or substrates, which provides a smooth surface that is substantially free of scratches.
Abstract
A method and apparatus (400) to facilitate the successful and precise smoothing of conductive films on insulating films or substrates (352). The smoothing technique provides a smooth surface that is substantially free of scratches. By supplying a source of electrons (410), harmful charging of the films and damage to the films are avoided.

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References
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Magnetoresistive sensor based on the spin valve effect

TL;DR: In this article, the spin valve effect was defined for a magnetoresistive sensor with a first and a second thin film layer of a magnetic material separated by a thin film of a non-magnetic metallic material.
Journal ArticleDOI

Effect of finite magnetic film thickness on Néel coupling in spin valves

TL;DR: In this paper, the effect of the finite thickness of the magnetic films in a spin valve was investigated and the Neel model was used to describe the ferromagnetic magnetostatic interaction with the poles at the inner surface of the opposite layer.
Journal ArticleDOI

Magnetic changes in GMR heads caused by electrostatic discharge

TL;DR: In this article, the effects of current transients on the magnetic response of GMR sensors are studied and it is shown that GMR sensor with an FeMn exchange layer exhibit large magnetic changes after a single ESD current transient.
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Apparatus and method for neutralizing the beam in an ion implanter

TL;DR: In this paper, an ion implanter is described with provision for neutralizing the space charge potential of the ionic beam with a closed loop feedback system responding to the electrical charges that tend to accumulate on a target specimen.
Proceedings ArticleDOI

Giant magnetoresistance: a primer

TL;DR: The giant magnetoresistance effect appears in a number of ultrathin multilayer systems in which thin magnetic films, a few tens of AA thick, are separated by nonmagnetic metal films, also on the order of tens to 1000 AA thick.