Patent
Optical beam homogenizer
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TLDR
An optical beam homogenizer divides and redirects an incident beam to provide uniform irradiation to a plane surface as mentioned in this paper, which is useful for metal hardening, semiconductor annealing, or other materials processing applications.Abstract:
An optical beam homogenizer divides and redirects an incident beam to provide uniform irradiation to a plane surface. The beam homogenizer is particularly useful in an apparatus and method for uniform laser irradiation of materials. The apparatus comprises a laser, a beam homogenizer, and a support for the material being irradiated. Depending on the system parameters, the apparatus is useful for metal hardening, semiconductor annealing, or other materials processing applications.read more
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Patent
Laser beam machining method
Fumitsugu Fukuyo,Kenshi Fukumitsu,Naoki Uchiyama,Toshimitsu Wakuda,Kazuhiro Atsumi,Kenichi Muramatsu +5 more
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References
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Patent
Method for improving the crystallinity of semiconductor films by laser beam scanning and the products thereof
John C. C. Fan,Herbert J. Zeiger +1 more
TL;DR: In this paper, a method for improving the crystallinity of semiconductor films by scanning the surface of such films with a shaped, focused laser beam is described, where the laser is matched to the film so that the beam delivers sufficient energy to heat the film above a temperature at which crystallization occurs along the scan track.
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