Journal ArticleDOI
Optimization of technological parameters in plasma chemical etching of quartz single crystals
TLDR
In this paper, the effect of the technological parameters on the rate of the plasmochemical etching of single-crystal quartz was evaluated. But the experimental results made it possible to evaluate for the first time the influence exerted by the technological parameter on the etching rate, and it was shown that the influence decreased in the following order: pressure in the reaction chamber, bias potential, RF power, and hydrogen flow rate.Abstract:
Main technological parameters of the process of local plasmochemical etching of single-crystal quartz were optimized. The etching was performed in a gas mixture of CF4 and H2 under radio frequency (RF, 13.56 MHz) discharge excitation. The scientific experiment design by the Taguchi matrix method was used to examine the effect of chamber pressure, RF generator power, negative bias applied to the substrate holder, and hydrogen flow rate on the rate of the etching process. The experimental results made it possible to evaluate for the first time the influence exerted by the technological parameters on the etching rate. It was shown that the influence exerted by the technological parameters in the conditions under study decreases in the following order: pressure in the reaction chamber, bias potential, RF power, hydrogen flow rate.read more
Citations
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Journal ArticleDOI
Development of Process for Fast Plasma-Chemical Through Etching of Single-Crystal Quartz in SF6/O2 Gas Mixture
TL;DR: In this article, a method of scientific experiment design based on the Taguchi matrix technique was used to rank basic technological parameters (bias voltage applied to the substrate holder, output power of the high-frequency generator, oxygen flow rate, and position of substrate holder relative to the lower edge of the discharge chamber) as regards their influence on the etching rate.
Journal ArticleDOI
Etching of SiC in Low Power Inductively-Coupled Plasma
TL;DR: In this paper, the effect of bias voltage applied to the substrate holder on the etching rate was investigated and it was shown that the additional treatment of SiC surface in Ar plasma positively affects the morphology of the surface, minimizing the surface density of various defects.
Journal ArticleDOI
Aspect-Independent Siliconglass Etching by Bosch Method
TL;DR: In this paper, the Bosch process was used for glass etching of monocrystalline silicon using the conditions of aspect independent etching, and it was found that in order to level the problems that arise, it is necessary to vary the temporal relations of etching and passivation stages.
Journal ArticleDOI
Calculating the Nominal Values of the Matching Device Installation of Plasma Chemical Etching
E.V. Endiiarova,Singh Ruby +1 more
TL;DR: In this paper, the nominal values of the matching device for the modified plasma chemical etching installation "Plasma 600T" were calculated based on the estimated values of discharge impedance (plasma).
Journal ArticleDOI
Registration of an ICP Plasma CV Dependences under Various Pressures in the Plasma-Chemical Deep Etching System
TL;DR: In this paper, a single Langmuir probe with high-frequency compensation system and a special electrical circuit was designed and constructed for diagnostics of ICP plasma chemical processing system.
References
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Journal ArticleDOI
Plasma etching—A discussion of mechanisms
J. W. Coburn,Harold F. Winters +1 more
TL;DR: In this paper, the etching process is discussed in terms of three basic steps: adsorption, product formation, and product desorption with the goal of clarifying the relative importance of these three steps.
Journal ArticleDOI
A survey on the reactive ion etching of silicon in microtechnology
TL;DR: In this article, a brief review of dry etching as applied to pattern transfer, primarily in silicon technology, is presented, focusing on concepts and topics for etching materials of interest in micromechanics.
Journal ArticleDOI
Study of the SiO2-to-Si3N4 etch selectivity mechanism in inductively coupled fluorocarbon plasmas and a comparison with the SiO2-to-Si mechanism
M. Schaepkens,T. E. F. M. Standaert,N. R. Rueger,Pgm Patrick Sebel,Gottlieb S. Oehrlein,J. M. Cook +5 more
TL;DR: In this paper, the mechanisms underlying selective etching of a SiO2 layer over a Si or Si3N4 underlayer, a process of vital importance to modern integrated circuit fabrication technology, has been studied.
Journal ArticleDOI
Kinetics of F atoms and fluorocarbon radicals studied by threshold ionization mass spectrometry in a microwave CF4 plasma
TL;DR: In this paper, the absolute concentration of fluorine atoms (F), a parameter of great importance for the characterization and modeling of etching plasmas, was measured by means of threshold ionization mass spectrometry in a CF4 microwave plasma.