Journal ArticleDOI
Particulate generation in silane/ammonia rf discharges
TLDR
The rate of particle generation in a SiH4/NH3 rf discharge has been studied as a function of the discharge operating parameter space, electrode geometry, and power supply coupling mode.Abstract:
The rate of particle generation in a SiH4/NH3 rf discharge has been studied as a function of the discharge operating parameter space, electrode geometry, and power supply coupling mode. Measurements of the bulk quantity of particles produced in the discharge reveal that the mode of coupling (capacitive or dc) as well as the electrode temperature significantly affects particle generation rates. Laser light scattering measurements made as a function of the plasma power density indicate that particle generation abruptly ceases at a threshold value sufficient to induce spark breakdown at the cathode. Based on these observations, it is shown that particle growth in plasmas can be modeled entirely as a heterogeneous process. The initiation of particle growth is shown to be consistent with an electron surface desorption model involving vibrational excitation of surface clusters. Propagation of growth in the gas phase is shown to be consistent with an eliminative ion‐molecular condensation reaction, and the press...read more
Citations
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Journal ArticleDOI
Coulomb solids and low-frequency fluctuations in RF dusty plasmas
J. H. Chu,Ji Bin Du,I. Lin +2 more
TL;DR: In this article, the collective behavior of weakly ionized RF dusty plasmas is investigated, where negatively charged SiO2 fine particles are generated and suspended in an SiH4/O2/Ar discharge.
Journal ArticleDOI
Particle charging in low‐pressure plasmas
Themis Matsoukas,Marc Russell +1 more
TL;DR: In this article, the average charge and the variance as a function of the parameters of the plasma ne/ni, Te/Ti, and Me/Mi were derived for the Druyvesteyn model.
Journal ArticleDOI
The physics and chemistry of dusty plasmas
TL;DR: An overview of the most recent experimental and modelling efforts on powder formation in reactive plasmas is given in this paper, where particle charging and charge fluctuations regarding the particle agglomeration is emphasised.
Journal ArticleDOI
Levitation of dust in rf and dc glow discharges
Abstract: We have examined the dynamics of dust in collisionless and collisional electrode sheaths of dc and rf glow discharges. The charge of the dust particles, the various forces, oscillation frequencies, damping effects and energy potential extrema are calculated. In the rf sheaths the dust particle charge is negative in the whole sheath, while in the dc sheaths the dust particle charge is positive in a major part of the sheath. Collection of dust leads to changes in the dust and plasma potentials and to a reduction in the maximum dust particle size that can be levitated. Close to the electrode there will be a dust-free zone.
Journal ArticleDOI
Particulate formation and dusty plasma behaviour in argon-silane RF discharge
A. Bouchoule,Laifa Boufendi +1 more
TL;DR: In this paper, the authors presented an overview of research on a dusty plasma as obtained in a low-pressure discharge, as well as recent insights obtained in the properties of dusty plasmas, as given in an invited talk at XIth ESCAMPIG Conference in St Petersburg.
References
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The science and engineering of materials
TL;DR: This paper provided an understanding of the relationship between structure, processing, and properties of materials, and provided a general overview, focusing on mechanical behavior, or focusing on physical properties, by selecting the appropriate topics from this wealth of material.
Journal ArticleDOI
The hydrogen content of plasma‐deposited silicon nitride
William A. Lanford,M. J. Rand +1 more
TL;DR: The hydrogen content of glow-dischargedeposited silicon nitride (SiN) films made at 330-350°C has been determined in this article, using the resonant nuclear reaction 15N+H→12C+4He+γ ray.
Journal ArticleDOI
Electronic and Atomic Collisions.
W. L. Fite,E. Gerjuoy +1 more
TL;DR: What do you do to start reading electronic and atomic collisions ?