scispace - formally typeset
Journal ArticleDOI

Photoetching of Si(111)-(7 × 7) studied by STM

X.H. Chen, +2 more
- 10 Apr 1997 - 
- Vol. 376, pp 77-86
TLDR
In this paper, a partially chlorinated Si(111)-(7 × 7) surface was subjected to 193 nm excimer laser radiation, and the number of photoetched atoms per unit of illumination time was calculated.
About
This article is published in Surface Science.The article was published on 1997-04-10. It has received 37 citations till now. The article focuses on the topics: Fluence.

read more

Citations
More filters
Book

Materials Modification by Electronic Excitation

TL;DR: Itoh et al. as discussed by the authors reviewed the field of materials modification by electronic excitation and identified ways to connect understanding to technological needs, like selective removal of material, controlled changes, altering the balance between process steps, and possibilities of quantum control.
Journal ArticleDOI

Materials modification by electronic excitation

TL;DR: In this article, it was shown that modification by electronic excitation can be achieved in a far wider range of materials, such as alkali halides, alkaline earth fluorides and fused quartz.
Journal ArticleDOI

Electron-induced “localized atomic reaction” (LAR): Chlorobenzene adsorbed on Si(111) 7×7

TL;DR: In this article, electron impact imprints the self-assembled pattern of chlorobenzene (ClPh) on the surface as Cl-Si on the same area of the unit cell as ClPh(ad), but at adjacent atomic sites.
Journal ArticleDOI

Stereo-selective binding of chlorobenzene on Si(111)-7×7

TL;DR: In this paper, the adsorption and binding of chlorobenzene (C6H5Cl) on clean and D-modified Si(111)-7×7 surfaces have been investigated using high resolution electron energy loss spectroscopy (HREELS) and thermal desorption (TDS).
Patent

Method of molecular-scale pattern imprinting at surfaces

TL;DR: In this paper, a method for mask-free molecular or atomic patterning of surfaces of reactive solids is disclosed, where molecules adsorb at surfaces in patterns, governed by the structure of the surface, the chemical nature of the adsorbate, and the coverage at the surface.
References
More filters
Journal ArticleDOI

Low Temperature Surface Cleaning of Silicon and Its Application to Silicon MBE

TL;DR: In this article, a low temperature thermal cleaning method for Si molecular beam epitaxy (MBE) is proposed, which consists of wet chemical treatment to eliminate carbon contaminants on Si substrates, thin oxide film formation to protect the clean Si surface from contamination during processing before MBE growth, and desorption of the thin oxide films under UHV.
Journal ArticleDOI

Desorption from Metal Surfaces by Low‐Energy Electrons

TL;DR: In this paper, the effect of low-energy electrons on hydrogen, oxygen, carbon monoxide, and barium adsorbed on tungsten has been investigated by a field-emission technique.
Journal ArticleDOI

Structure analysis of si(111)-7×7 reconstructed surface by transmission electron diffraction

TL;DR: In this article, the atomic structure of the 7 × 7 reconstructed Si(111) surface has been analyzed by ultra-high vacuum (UHV) transmission electron diffraction (TED).
Journal ArticleDOI

Atomic scale desorption through electronic and vibrational excitation mechanisms

TL;DR: The scanning tunneling microscope has been used to desorb hydrogen from hydrogen-terminated silicon surfaces and a countable number of desorption sites can be created and the yield and cross section are obtained.
Related Papers (5)