Proceedings ArticleDOI
Pressure sensing in vacuum hermetic micropackaging for MOEMS-MEMS
Marco Michele Sisto,Sonia M. García-Blanco,Loïc Le Noc,Bruno Tremblay,Yan Desroches,Jean-Sol Caron,Francis Provençal,Francis Picard +7 more
- Vol. 7592, pp 759204
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TLDR
In this article, a low-cost, low-temperature hybrid vacuum micropackaging technology was developed for IR bolometer arrays, which can be integrated with the IR bolometers in a die-level packaging process or microfabricated simultaneously on the same die.Abstract:
Packaging constitutes one of the most costly steps of MEMS/MOEMS manufacturing. Uncooled IR bolometers require a
vacuum atmosphere below 10 mTorr to operate at their highest sensitivity. The bolometer response is also dependent on
the package temperature. In order to minimize cost, real estate and power consumption, temperature stabilization is
typically not provided to the package. Hence, long term high sensitivity operation of IR bolometric radiometers requires
a calibration as function of in package pressure and temperature. A low-cost and accurate means of measuring the
pressure in the package without being affected by the operating temperature is therefore needed.
INO has developed a low-cost, low-temperature hybrid vacuum micropackaging technology 1-3 . An equivalent flow rate
of 4×10 -14 Torr·L/sec for storage at 80°C has been obtained without getter. Even with such low flow, the long term
stabilization of residual pressure variations affects the sensitivity and calibration of the IR bolometers. INO has
developed MEMS pressure sensors that allow for real-time measurement of package pressure above 1 mTorr, and can be
integrated with the IR bolometers in a die-level packaging process or microfabricated simultaneously on the same die.
In this paper, the typical performance and measurement uncertainty of these pressure sensors will be presented along
with a reading method that provides a pressure measurement with a dependence on the package temperature as low as
0.7 %/°C. Complex reading circuit or temperature control of the packages are not required, making the pressure sensor
well adapted for low-cost high-volume production and integration with IR bolometer arrays.read more
Citations
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Proceedings ArticleDOI
Novel vacuum packaged 384×288 broadband bolometer FPA with enhanced absorption in 3-14μm wavelength
Bruno Fisette,Mathieu Tremblay,Hassane Oulachgar,Francis Généreux,David Béland,Patrick Beaupré,Christian Julien,Sebastien Deshaies,Marc Terroux,Bruno Tremblay,Denis Dufour,Christine Alain +11 more
TL;DR: In this paper, the authors developed a fully packaged focal plane array of broadband microbolometers, which makes use of a gold black thin film to expand its absorption range from 3 to 14 μm.
Proceedings ArticleDOI
Influence of ceramic package internal components on the performance of vacuum sealed uncooled bolometric detectors
TL;DR: In this paper, a hermeticity yield over 80% was obtained for batches of twelve bolometric detectors packaged simultaneously, and the influence of various package internal components, in particular the CMOS circuits, on vacuum performance was presented.
Journal ArticleDOI
Electrical and thermal conduction in ultra-thin freestanding atomic layer deposited W nanobridges
TL;DR: Results indicate phonon contribution to thermal conductivity is dominant in these ALD films and may be substantially reduced by the incorporation of periodicity in the ALD W/Al2O3 nanolaminates.
Proceedings ArticleDOI
Design and fabrication of a scalable high-reliability vacuum sealed package for infrared detectors
B. Fisette,Claude Chevalier,A. Lepine,M. A. Boucher,C. Larouche,M.-J. Tremblay,D. Lemieux,L. P. Tremblay,Denis Dufour,Yan Desroches,Patrice Topart,F. Chateauneuf +11 more
TL;DR: In this article, the authors designed and manufactured a new reliable vacuum-sealed package suitable for the packaging of several sizes and types of microbolometer FPAs, which can be used in different configurations to meet specific requirements.
References
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High performance Pirani vacuum gauge
TL;DR: In this article, a wide range Pirani gauge that is capable of measuring vacuum pressure down to 10−7 Torr reproducibly has been built, with a thermal drift as small as 5.7 μV/°C.
Journal ArticleDOI
A micromachined Pirani gauge with dual heat sinks
TL;DR: In this paper, the authors presented a micromachined Pirani gauge with dual heat sinks that can be integrated with microelectromechanical systems (MEMS) devices inside a vacuum package to monitor long-term pressure changes and stability inside the package.
Journal ArticleDOI
Microstructured vacuum gauges and their future perspectives
F. Völklein,A Meier +1 more
TL;DR: In this article, a micro-Pirani gauge is proposed based on the principle that the heat transfer between two surfaces is proportional to the number of molecules transferring the heat, when the mean free path in the gas is larger than the distance between the surfaces.