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Journal ArticleDOI

Reduced order model of parametric resonance of electrostatically actuated MEMS cantilever resonators

TLDR
In this paper, a comparison between the Reduced Order Model (ROM) method and the Method of Multiple Scales (MMS) for both small and large amplitudes is reported for parametric resonance of microelectromechanical cantilever resonators under soft damping, and soft alternating current (AC) electrostatic actuation to include fringing effect.
Abstract
This paper deals with parametric resonance of microelectromechanical (MEMS) cantilever resonators under soft damping, and soft alternating current (AC) electrostatic actuation to include fringing effect. A comparison between the Reduced Order Model (ROM) method and the Method of Multiple Scales (MMS) for both small and large amplitudes is reported. The actuation is parametric non-linear. It includes non-linear terms with periodic coefficients. The AC frequency is near resonator׳s natural frequency. The amplitude frequency response is investigated using ROM. Damping, voltage, and fringe effects on the response are also reported. It is showed that five terms ROM accurately predicts the behavior of the resonator at all amplitudes, while MMS is accurate only for small amplitudes.

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Citations
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Journal ArticleDOI

Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances

TL;DR: An overview is presented of the various used dynamical approaches to enhance the sensitivity of resonators for sensing applications and analytical approaches that have been developed to better understand and investigate the dynamical behavior of M/NEMS resonators on the multiple time scales.
Journal ArticleDOI

A review on the statics and dynamics of electrically actuated nano and micro structures

TL;DR: In this article, the authors present the current stage of the research on electrically actuated NEMS/MEMS by analysing the latest models and studies in this field in the framework of electro-mechanical coupling and small-size effects.
Journal ArticleDOI

Nonlinear pull-in instability of carbon nanotubes reinforced nano-actuator with thermally corrected Casimir force and surface effect

TL;DR: An analytical model of investigating the pull-in characteristics of CNTs reinforced nano-actuator with temperature-dependency subjected to coupled electrostatic loading, dispersion forces as van der Waals and thermally corrected Casimir force, and surface stress are derived based on von Karman's geometric nonlinearity and surface elasticity as mentioned in this paper.
Journal ArticleDOI

Nonlinear vibration of a beam with asymmetric elastic supports

TL;DR: In this article, a viscoelastic beam supported by vertical springs is proposed with nonrotatable left boundary and freely rotatable right end, and the steady-state responses of the beam excited by a distributed harmonic force are obtained by an approximate analytical method and a numerical approach.
Journal ArticleDOI

Nonlinear dynamic characteristics of FGCNTs reinforced microbeam with piezoelectric layer based on unifying stress-strain gradient framework

TL;DR: In this article, a size-dependent model of functionally graded carbon nanotubes (FGCNTs) reinforced microbeam with piezoelectric layer is presented based on unifying nonlocal stress and strain gradient framework.
References
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Journal ArticleDOI

A reduced-order model for electrically actuated microbeam-based MEMS

TL;DR: In this paper, a reduced-order model is proposed to investigate the behavior of electrically actuated microbeam-based MEMS devices by discretizing the distributed-parameter system using a Galerkin procedure into a finite-degree-of-freedom system consisting of ordinary-differential equations in time.
Journal ArticleDOI

Dynamic pull-in phenomenon in MEMS resonators

TL;DR: In this paper, the pull-in instability in microelectromechanical (MEMS) resonators was studied and the authors proposed a low-voltage MEMS RF switch actuated with a combined DC and AC loading, which uses a voltage much lower than the traditionally used DC voltage.
Journal ArticleDOI

Effect of cubic nonlinearity on auto-parametrically amplified resonant MEMS mass sensor

TL;DR: In this article, the effects of nonlinearity on the behavior of parametric resonance of a micro-machined oscillator were investigated. And the authors showed that the nonlinearities (electrostatic and mechanical) have a large impact on the dynamic response of the structure.
Journal ArticleDOI

Electromechanical Model of Electrically Actuated Narrow Microbeams

TL;DR: In this article, a consistent one-dimensional distributed electromechanical model of an electrically actuated narrow microbeam with width/height between 0.5 and 2.0 is derived, and the needed pull-in parameters are extracted with different methods.
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