Research Progress of MEMS Inertial Switches
Reads0
Chats0
TLDR
In this article , an exhaustive summary of the design concept, performance aspects, and fabrication methods of the micro electromechanical system (MEMS) inertial switch is provided, and the main conclusions of the current challenges and prospects about MEMS inertial switches are drawn to assist with the development of research in the field of future engineering applications.Abstract:
As a typical type of MEMS acceleration sensor, the inertial switch can alter its on-off state while the environmental accelerations satisfy threshold value. An exhaustive summary of the design concept, performance aspects, and fabrication methods of the micro electromechanical system (MEMS) inertial switch is provided. Different MEMS inertial switch studies were reviewed that emphasized acceleration directional and threshold sensitivity, contact characteristics, and their superiorities and disadvantages. Furthermore, the specific fabrication methods offer an applicability reference for the preparation process for the designed inertial switch, including non-silicon surface micromachining technology, standard silicon micromachining technology, and the special fabrication method for the liquid inertial switch. At the end, the main conclusions of the current challenges and prospects about MEMS inertial switches are drawn to assist with the development of research in the field of future engineering applications.read more
Citations
More filters
Journal ArticleDOI
Fabrication and Characterization of the Micro-Heater and Temperature Sensor for PolyMUMPs-Based MEMS Gas Sensor
Abdullah Saleh Algamili,M Haris M Khir,A. Y. Ahmed,Almur. A. S. Rabih,S. S. Ba-Hashwan,S. S. Alabsi,O. L. Al-Mahdi,Usman Isyaku,Mawahib Gafare Abdalrahman Ahmed,Muhammad Junaid +9 more
TL;DR: In this article, the authors describe the fabrication and characterization of a micro-electro-mechanical system (MEMS) sensor for gas sensing applications, and compare the measured and calculated resistance values of the micro-heater and the temperature sensor.
Journal ArticleDOI
An Interface ASIC Design of MEMS Gyroscope with Analog Closed Loop Driving
TL;DR: In this article , a digital interface application-specific integrated circuit (ASIC) for a micro-electromechanical systems (MEMS) vibratory gyroscope was introduced.
Journal ArticleDOI
Optical Switching Data Center Networks: Understanding Techniques and Challenges
TL;DR: In this article , the authors summarized the topologies and traffic characteristics in data centers and analyzed the reasons and importance of moving to optical switching, and summarized and reported the main challenges limiting the practical deployments of optical switches in data centres.
Journal ArticleDOI
Electromechanical analysis of a self-sensing torsional micro-actuator based on CNTs reinforced piezoelectric composite with damage
TL;DR: In this paper , a self-sensing actuating composite structure for constructing an electrostatic torsional actuator is proposed, which is capable of self-adjusting pull-in titling angle of micro-actuator based on strain gradient theory with size dependency and damage.
Journal ArticleDOI
Development of a Fully Compliant Bistable Mechanism Based on Circular Beams with Enhanced Pitch Stiffness
TL;DR: In this article , a bistable mechanism with circular beams instead of conventional straight beams was developed to improve robustness against external loads in the out-of-plane region, and an analytical kinetostatic model was established to predict the bistability behavior of the proposed mechanism.
References
More filters
Journal ArticleDOI
A self-retracting fully compliant bistable micromechanism
N.D. Masters,Larry L. Howell +1 more
TL;DR: In this article, a self-retracting fully compliant bistable mechanism (SRFBM) is proposed, which uses tensural pivots to manage compressive loading in compliant mechanisms.
Journal ArticleDOI
A micromechanical switch with electrostatically driven liquid-metal droplet
TL;DR: In this paper, a micro-scale liquid-metal droplet is driven by electrostatic force between a grounded liquid metal and imbedded driving electrodes, all placed inside of an anisotropic etched silicon cavity.
Journal ArticleDOI
Plastic latching accelerometer based on bistable compliant mechanisms
TL;DR: In this paper, a bistable compliant mechanism that switches from one mechanical position to another when the force on the accelerometer exceeds a threshold value was used to achieve latching.
Journal ArticleDOI
Three-axes monolithic silicon low-g accelerometer
TL;DR: In this article, four different designs for a new three-axes monolithic low-g acceleration sensor are presented, and two alignment structures are presented meeting the high requirements in terms of mask alignment, which are necessary when using the described etch technique.
Journal ArticleDOI
Aligned carbon nanotube arrays for degradation-resistant, intimate contact in micromechanical devices.
TL;DR: The emergence of and advances in nano/ microelectromechanical systems (N/ MEMS) have enabled the realization of miniaturized mechanical switches with high functionality in terms of low power consumption, fast operating speed, and low cost of fabrication.