Proceedings ArticleDOI
Sensitivity-maximizing and error-reducing design of a flow and thermal property sensor
A.S. Cubukcu,Gerald Urban +1 more
- pp 1-6
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TLDR
A combined-application nanocalorimeter is developed at IMTEK in order to sense both flow and thermal properties of the flowing medium at the same time as mentioned in this paper, which is designed to measure flow velocity, direction, thermal conductivity of the fluid, and its specific heat by application of a sinusoidal heating.Abstract:
A combined-application nanocalorimeter is being developed at IMTEK in order to sense both flow and thermal properties of the flowing medium at the same time. It is designed to measure flow velocity, direction, thermal conductivity of the fluid, and its specific heat by application of a sinusoidal heating. In this report, we present the effects of design geometry and temperature sensor locations on accuracy and sensitivity, respectively. Flow measurement range and flow direction dependence of a 2D flow sensor are investigated via 3D FEM simulations. Based on the results of the simulations, the sensor will exhibit maximum sensitivity and a reduced error.read more
Citations
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Journal ArticleDOI
A 2D thermal flow sensor with sub-mW power consumption
TL;DR: In this paper, a low-power 2D flow sensor with high temperature resolution and low power consumption was used to estimate the air flow velocity of a flying object at a power of 1.77mWrms.
Journal ArticleDOI
A dynamic thermal flow sensor for simultaneous measurement of thermal conductivity and flow velocity of gases
TL;DR: In this article, the authors describe individual influences of gas flow velocity and thermal conductivity on temperature amplitude and phase measurements from a dynamic MEMS thermal flow sensor that employs AC heating at 200 Hz.
Proceedings ArticleDOI
Simulation and fabrication of a 2D-flow sensor for thermal characterization of fluids and for flow speed measurements
A.S. Cubukcu,Gerald Urban +1 more
TL;DR: In this article, an enhanced flow sensor is developed at IMTEK to enable simultaneous measurement of thermal properties of a fluid and its flow velocity, which is necessary to measure flow rates accurately by thermal means in cases where fluid properties fluctuate in time.
Journal ArticleDOI
Microfabrication of a variable range and multi-directionally sensitive thermal flow sensor
Milad Yarali,Sanjeev K. Khanna +1 more
TL;DR: In this paper, the design, fabrication and characterization of a variable range and multi-directionally sensitive micromachined thermal flow sensor based on amorphous germanium thermistors is described.
Journal ArticleDOI
Simulation and fabrication of a 2D-flow sensor for simultaneous fluid characterization
A.S. Cubukcu,Gerald Urban +1 more
TL;DR: In this article, an enhanced flow sensor is developed at IMTEK to enable simultaneous fluid characterization and flow velocity measurement, which is necessary to measure flow rates accurately by thermal means in cases where fluid properties fluctuate in time.
References
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Wide range semiconductor flow sensors
TL;DR: In this article, an air flow measuring range from 0.6 ml/h to at least 150 l/h has been achieved, e.g. with a rectangular flow channel of 0.54 mm 2 cross-sectional area.
Proceedings ArticleDOI
Thermal flow micro sensors
TL;DR: In this paper, a review is given on sensors fabricated by silicon micromachining technology using the thermal domain for the measurement of fluid flow. Attention is paid especially to performance and geometry of the sensors.
Journal ArticleDOI
High resolution flow characterization in Bio-MEMS
TL;DR: In this article, a micro-sensor compatible with Bio-MEMS applications for wide-range thermal flow rate measurements in liquids is introduced, based on the applied materials and geometry, the sensor allows an outstanding resolution at minimum thermal crosstalk, enabling flow rate measurement down to 100 μg/h in water, i.e. 100 nl/h.
Journal ArticleDOI
Highly sensitive ac nanocalorimeter for microliter-scale liquids or biological samples
TL;DR: In this paper, an ultrasensitive ac nanocalorimeter was developed for use with biological liquids by means of microfabrication technologies, tested on deionized water, allowing the measurement of heat capacity variation above ±150 nJ/K (resolution of ±5×10−6) with an operating temperature ranging from −20 to 120°C and a stability of 100 μK.
Journal ArticleDOI
Multi-parameter detection in fluid flows
J.C.C. van Kuijk,Theodorus S.J. Lammerink,H.E. de Bree,Michael Curt Elwenspoek,J.H.J. Fluitman +4 more
TL;DR: In this article, a micromechanically fabricated thermal flow sensor is presented, which incorporates multiple, 100 μm spaced, resistive sensing elements on a glass substrate in a silicon flow channel.