Proceedings ArticleDOI
Structured design of integrated MEMS
Gary K. Fedder
- pp 1-8
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TLDR
In this paper, a capacitive lateral accelerometer illustrates the structured design flow from a system description, to circuit representation, layout and fabrication, with tools for layout synthesis, layout extraction, and verification specifically tailored for MEMS.Abstract:
MEMS design methodologies in wide use today do not support hierarchical representations suitable for verification-based iterative design. Adoption of a structured design methodology which borrows hierarchy from the electronics design paradigm enables rapid design verification of complex electronic and micromechanical trade-offs inherent in integrated MEMS. A hierarchical MEMS circuit representation is analogous to and compatible with transistor-level circuits for electronics. Design of a capacitive lateral accelerometer illustrates the structured design flow from a system description, to circuit representation, layout and fabrication. Tools for layout synthesis, layout extraction, and verification specifically tailored for MEMS are an integral part of the design flow. The accelerometer is fabricated in a low-cost CMOS micromachining process that is especially suited to rapid prototyping of integrated MEMS.read more
Citations
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Journal ArticleDOI
Emerging simulation approaches for micromachined devices
TL;DR: The most commonly used method, that of using physical insight to develop parameterized macromodels, is presented first, and the issues associated with fitting the parameters to simulation data while incorporating design attribute dependencies are considered.
Journal ArticleDOI
Efficient mixed-domain analysis of electrostatic MEMS
Gang Li,Narayana R. Aluru +1 more
TL;DR: Efficient computational methods for scattered point and meshless analysis of electrostatic microelectromechanical systems (MEMS) are presented, showing flexible, efficient, and attractive alternatives compared to conventional finite element/boundary element methods for self-consistent electromechanical analysis.
Proceedings ArticleDOI
Automated optimal synthesis of microaccelerometers
TL;DR: In this article, a lateral accelerometer is synthesized from high-level functional specifications and design constraints using an optimization-based approach to design, which allows the designer to determine the crucial design tradeoffs in meeting the system-level performances.
Journal ArticleDOI
Hierarchical design and test of integrated microsystems
TL;DR: This article presents emerging results of an integrated mixed-domain design methodology similar to the mixed-signal design methodologies in the VLSI community that includes a Spice-like nodal simulation environment, an "on-the-fly" component layout-synthesis module, a layout extractor for design verification, and a fault model generator for test methodology development.
Journal ArticleDOI
A design flow for micromachined electromechanical systems
TL;DR: I present a design flow for integrated microelectromechanical systems (MEMS), with particular focus on electromechanical devices, and several design examples of real-world devices are given.
References
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Journal ArticleDOI
Micromachined inertial sensors
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Journal ArticleDOI
Corner Stitching: A Data-Structuring Technique for VLSI Layout Tools
TL;DR: The algorithms are presented under a simplified model of VLSI circuits, and the storage requirements of the structure are discussed.
Proceedings ArticleDOI
Laminated high-aspect-ratio microstructures in a conventional CMOS process
Gary K. Fedder,Suresh Santhanam,Michael L. Reed,S.C. Eagle,D.F. Guillou,Michael S.-C. Lu,L.R. Carley +6 more
TL;DR: In this paper, self-actuating springs and nested comb-drive lateral resonators are fabricated using a 0.8/spl mu/m 3-metal CMOS process available through MOSIS.