Journal ArticleDOI
Texture characterisation of sputtered MoS2 thin films by cross-sectional TEM analysis
Reads0
Chats0
TLDR
In this paper, cross sections of RF sputtered MoS2 thin films are investigated using lattice resolution transmission electron microscopy and electron diffraction, and the results are compared with X-ray diffraction measurements.Abstract:
Cross sections of RF sputtered MoS2 thin films are investigated using lattice resolution transmission electron microscopy and electron diffraction. The results are compared with X-ray diffraction measurements. The films have a (001) texture (type II) in the first nanometres near the interface and a conventional (100) texture (type I) in the upper part.read more
Citations
More filters
Journal ArticleDOI
Polyhedral and cylindrical structures of tungsten disulphide
TL;DR: In this article, the formation of equivalent stable structures in the layered semiconductor tungsten disulphide was reported, and the closed nature of the structures was verified by electron diffraction and lattice imaging.
Patent
Oriented polycrystalline thin films of transition metal chalcogenides
TL;DR: In this article, a polycrystalline thin film of a transition metal chalcogenide of an orientation on a substrate is presented, which is substantially exclusively oriented in the orientation.
Journal ArticleDOI
Structural and tribological studies of MoS2 solid lubricant films having tailored metal-multilayer nanostructures
Michael R. Hilton,Reinhold Bauer,Stephen V. Didziulis,Michael T. Dugger,John M. Keem,James Scholhamer +5 more
TL;DR: In this paper, multilayer Molybdenum disulfide (MoS 2 ) solid lubricant films were prepared by r.f. magnetron sputtering on 440C steel, 52100 steel, and silicon substrates.
Journal ArticleDOI
Metal incorporation in sputter-deposited MoS2 films studied by extended x-ray absorption fine structure
TL;DR: In this paper, the authors used the extended x-ray absorption fine structure (EXAFS) technique for elucidating the structure of poorly crystalline films, and showed that film densification in Ni-cosputtered films is caused by NiOx formation at the edges of nucleating MoS2−xOx/MoS2 crystallites, limiting the crystallite size attainable within the films.
Journal ArticleDOI
Highly Oriented WSe2 Thin-Films Prepared by Selenization of Evaporated WO3
TL;DR: In this article, a hexagonal 2H phase was found in WO 3 films of WSe 2 on quartz in an open tube furnace and the films were investigated by X-ray diffraction, Xray photoelectron spectroscopy, scanning electron microscopy and optical absorption.
References
More filters
Journal ArticleDOI
Fundamental aspects of the electronic structure, materials properties and lubrication performance of sputtered MoS2 films
TL;DR: In this article, experimental results concerning the electronic and crystal structures, film adhesion and bulk friction of sputter-deposited MoS 2 films are reviewed and discussed, and a model using a molecular orbital description of the electronic energy levels is presented that can be used to interpret these data.
Journal ArticleDOI
Preparation and properties of different types of sputtered MoS2 films
TL;DR: In this paper, it was shown that all three different types of sputtered MoS 2 films, namely type I, type II and amorphous, can be produced by a variation in this parameter solely.
Journal ArticleDOI
Orientation of rf-sputter-deposited MoS2 films
TL;DR: In this paper, a theory to predict the orientation of radiofrequency (RF) sputter-deposited MoS2 films with respect to the substrate surface is presented, where oxygen-containing species such as H2O and -OH are postulated to be active sites that force crystallites to form with their basal planes perpendicular to the surface.
Journal ArticleDOI
A neglected parameter (water contamination) in sputtering of MoS2 films
TL;DR: In this paper, a systematic study of the sources of contamination in sputtered molybdenum disulphide films is carried out, and the only significant impurity from the deposition process is water, which is present in trace amounts.