Patent
Wafer handling apparatus and method
TLDR
In this paper, a wafer processing apparatus, comprising a Wafer Processing Station, a key input portion for inputting wafer instructions into the processing station, and at least one portion of the portion for accommodating a carrier for carrying the wafer, is disposed at a front side of the apparatus to which the operator faces when actuating the key input component.Abstract:
A wafer processing apparatus, comprising a wafer processing station for processing a wafer, a key input portion for inputting wafer processing instructions into the wafer processing station, and wherein at least one of a portion for accommodating a wafer carrier for carrying the wafer, a mechanism for taking the wafer out of the wafer carrier and putting it back into the wafer carrier, wafer alignment station for aligning the wafer and a wafer observing station for allowing an operator to observe the wafer, is disposed at a front side of the apparatus to which the operator faces when actuating the key input portion.read more
Citations
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References
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Patent
Method and apparatus for handling workpieces
TL;DR: In this paper, a semiconductor wafer is moved from a class 100 environment into a vacuum chamber in which pattern writing is performed on the chips by an electron beam without significantly affecting the vacuum level in the vacuum chamber.
Patent
Device for automatically transporting disk shaped objects
TL;DR: In this paper, an automatic transport of disk shaped objects from a discharge cassette adjustable in height through a position adjusting station to an inspection table and further into depository cassettes which are also adjustable in length in a step-wise manner.
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Wafer transfer apparatus
Steven Nyong Lee,Jae Yeal Kim +1 more
TL;DR: In this article, an automated system lifts a batch of semiconductor wafers from a slotted carrier, transfers them laterally and lowers them into a second sliding-window carrier.
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Wafer holding apparatus for ion implantation
TL;DR: In this article, an apparatus for the implantation of ions into semiconductor wafers is described, where a plurality of storage compartments are connected through valves to a vacuum chamber.
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Vacuum apparatus for handling sheets
TL;DR: In this paper, a supply carrier with a plurality of ledges to hold the flat sheets and a withdrawing means of a vacuum chuck to lift and hold the sheets between the adjacent ledges, attached to an elevator to raise and lower the chuck, the level of which is indexed by a control to progressively higher ledge levels as the lower sheets are removed.