A
Anton Stepanov
Publications - 2
Citations - 37
Anton Stepanov is an academic researcher. The author has contributed to research in topics: Ion implantation & Schottky barrier. The author has an hindex of 1, co-authored 2 publications receiving 2 citations.
Papers
More filters
Journal ArticleDOI
Ion implantation in β-Ga2O3: Physics and technology
Alena Nikolskaya,E. V. Okulich,Dmitry Korolev,Anton Stepanov,Dmitry Nikolichev,Alexey Mikhaylov,David Tetelbaum,A. V. Almaev,Charles A. Bolzan,Antônio BuaczikJr.,Raquel Giulian,Pedro Luis Grande,Ashok Kumar,Mahesh Kumar,D. Gogova +14 more
TL;DR: In this paper, the status of ion implantation in β-Ga2O3 is reviewed and the results of experimental study of damage under ion irradiation and the properties of Ga 2O3 layers doped by ion implantations are discussed.
Posted Content
Ion implantation in \b{eta}-Ga2O3: physics and technology
Alena Nikolskaya,E. V. Okulich,Dmitry Korolev,Anton Stepanov,Dmitry Nikolichev,Alexey Mikhaylov,David Tetelbaum,A. V. Almaev,Charles A. Bolzan,Antônio Jr Buaczik,Raquel Giulian,Pedro Luis Grande,Ashok Kumar,Mahesh Kumar,D. Gogova +14 more
TL;DR: In this article, the current status of ion beam implantation in \b{eta}-Ga2O3 is reviewed, and the main attention is paid to the results of experimental study of damage under ion irradiation and the properties of Ga2O 3 layers doped by ion implantation.