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Benno Margesin
Researcher at fondazione bruno kessler
Publications - 192
Citations - 2559
Benno Margesin is an academic researcher from fondazione bruno kessler. The author has contributed to research in topics: Capacitive sensing & Surface micromachining. The author has an hindex of 26, co-authored 184 publications receiving 2371 citations.
Papers
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Journal ArticleDOI
A micromachined gold–palladium Kelvin probe for hydrogen sensing
Arnaldo D'Amico,C. Di Natale,Eugenio Martinelli,A. Tibuzzi,Benno Margesin,Flavio Giacomozzi,G. Soncini,Carlos Calaza,Francesco Ficorella,Sergio Iarossi +9 more
TL;DR: In this article, the fundamental principles of the Kelvin probe apparatus are discussed, and an analytical relation for the sensitivity of vibrating capacitors, so that the advantages of integration can be quantitatively estimated.
Journal ArticleDOI
Novel design of a RF-MEMS tuneable capacitor based on electrostatically induced torsion
TL;DR: In this paper, the effect of the small in-plane force that develops during the polarization of a parallel plate capacitor with partially overlapping plates was exploited to design a new electromechanical design for a tuneable capacitor with a totally different shape from usual designs.
Proceedings Article
A reconfigurable impedance matching network employing rf-mems switches
TL;DR: The proposed circuit is composed of RF-MEMS ohmic relays, metal-insulatormetal capacitors and suspended spiral inductors, all integrated on a high resistivity Silicon substrate.
Proceedings ArticleDOI
Micromachined low actuation voltage RF MEMS capacitive switches, technology and characterization
Kamaljit Rangra,Romolo Marcelli,Giovanni Soncini,Flavio Giacomozzi,Benno Margesin,Leandro Lorenzelli,M. Mulloni,Cristian Collini +7 more
TL;DR: In this article, a low-loss, capacitive RF MEMS switches that utilize folded serpentine spring suspensions with large area actuation electrodes are implemented in standard 50 ohm CPW configuration.
Proceedings ArticleDOI
Terahertz microsensor for biomedical applications
Matteo Perenzoni,Daniele Perenzoni,David Stoppa,Viviana Mulloni,Francesco Solazzi,Giuseppe Resta,Benno Margesin +6 more
TL;DR: In this paper, a low-cost integrated microsensor for biomedical applications is proposed, composed by an antenna-coupled microbolometer as detector, which is coupled to a specifically designed integrated circuit for biasing and readout.