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Benno Margesin

Researcher at fondazione bruno kessler

Publications -  192
Citations -  2559

Benno Margesin is an academic researcher from fondazione bruno kessler. The author has contributed to research in topics: Capacitive sensing & Surface micromachining. The author has an hindex of 26, co-authored 184 publications receiving 2371 citations.

Papers
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A simple analytical method for residual stress measurement on suspended MEM structures using surface profilometry

TL;DR: In this paper, an analytical method to calculate residual stress and Young's modulus in clamped-clamped beams is presented. But the method is based on the determination of beam bending as a function of applied load by means of a surface profiler.
Proceedings ArticleDOI

RF-MEMS SPDT switch on silicon substrate for space applications

TL;DR: In this paper, the authors demonstrate the activity carried out under an ESA contract for the development of a miniaturized RF-MEMS SPDT switch and switch matrix using micromachining technology on a silicon substrate for power applications.
Journal ArticleDOI

An equivalent-circuit model for shunt-connected coplanar microelectromechanical system switches for high frequency applications

TL;DR: In this paper, a circuit model to predict the microwave response of a shunt-connected capacitive microelectromechanical coplanar switch is proposed, where the numerical values of the lumped elements composing the equivalent circuit are computed by means of a fully analytic approach.
Journal ArticleDOI

Dielectric charging in microwave microelectromechanical Ohmic series and capacitive shunt switches

TL;DR: In this paper, the expected response of MEMS switches to unipolar and bipolar dc actuation voltages has been measured and modeled, and the recorded data have been interpreted mainly through the Poole-Frenkel effect due to charge injection when a high voltage is applied to the dielectric layer.