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Benno Margesin
Researcher at fondazione bruno kessler
Publications - 192
Citations - 2559
Benno Margesin is an academic researcher from fondazione bruno kessler. The author has contributed to research in topics: Capacitive sensing & Surface micromachining. The author has an hindex of 26, co-authored 184 publications receiving 2371 citations.
Papers
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Journal ArticleDOI
A simple analytical method for residual stress measurement on suspended MEM structures using surface profilometry
TL;DR: In this paper, an analytical method to calculate residual stress and Young's modulus in clamped-clamped beams is presented. But the method is based on the determination of beam bending as a function of applied load by means of a surface profiler.
Proceedings ArticleDOI
RF-MEMS SPDT switch on silicon substrate for space applications
Paola Farinelli,Flavio Giacomozzi,G. Mannocchi,Romolo Marcelli,Benno Margesin,Paolo Mezzanotte,S. Di Nardo,Peter Russer,Roberto Sorrentino,F. Vitulli,Larissa Vietzorreck +10 more
TL;DR: In this paper, the authors demonstrate the activity carried out under an ESA contract for the development of a miniaturized RF-MEMS SPDT switch and switch matrix using micromachining technology on a silicon substrate for power applications.
Journal ArticleDOI
An equivalent-circuit model for shunt-connected coplanar microelectromechanical system switches for high frequency applications
Giancarlo Bartolucci,Romolo Marcelli,S. Catoni,Benno Margesin,Flavio Giacomozzi,Viviana Mulloni,Paola Farinelli +6 more
TL;DR: In this paper, a circuit model to predict the microwave response of a shunt-connected capacitive microelectromechanical coplanar switch is proposed, where the numerical values of the lumped elements composing the equivalent circuit are computed by means of a fully analytic approach.
Journal ArticleDOI
Cerenkov light identification with Si low-temperature detectors with sensitivity enhanced by the Neganov-Luke effect
L. Gironi,L. Gironi,M. Biassoni,M. Biassoni,C. Brofferio,C. Brofferio,Simone Capelli,Simone Capelli,Paolo Carniti,Paolo Carniti,Lorenzo Cassina,Lorenzo Cassina,Massimiliano Clemenza,Massimiliano Clemenza,Oliviero Cremonesi,M. Faverzani,M. Faverzani,Emanuele Ferri,E. Fossati,E. Fossati,A. Giachero,C. Giordano,Claudio Gotti,Claudio Gotti,M. Maino,M. Maino,Benno Margesin,F. Moretti,F. Moretti,A. Nucciotti,A. Nucciotti,M. Pavan,M. Pavan,G. Pessina,Stefano Pozzi,Stefano Pozzi,Ezio Previtali,A. Puiu,A. Puiu,Monica Sisti,Monica Sisti,F. Terranova,F. Terranova +42 more
TL;DR: In this paper, a new generation of cryogenic light detectors exploiting the Neganov-Luke effect to enhance the thermal signal has been used to detect the Cherenkov light emitted by electrons interacting in ${\mathrm{TeO}}_{2}$ crystals.
Journal ArticleDOI
Dielectric charging in microwave microelectromechanical Ohmic series and capacitive shunt switches
Romolo Marcelli,George Papaioannu,S. Catoni,Giorgio De Angelis,Andrea Lucibello,Emanuela Proietti,Benno Margesin,Flavio Giacomozzi,Francois Deborgies +8 more
TL;DR: In this paper, the expected response of MEMS switches to unipolar and bipolar dc actuation voltages has been measured and modeled, and the recorded data have been interpreted mainly through the Poole-Frenkel effect due to charge injection when a high voltage is applied to the dielectric layer.