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Benno Margesin

Researcher at fondazione bruno kessler

Publications -  192
Citations -  2559

Benno Margesin is an academic researcher from fondazione bruno kessler. The author has contributed to research in topics: Capacitive sensing & Surface micromachining. The author has an hindex of 26, co-authored 184 publications receiving 2371 citations.

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Journal ArticleDOI

Controlling stress and stress gradient during the release process in gold suspended micro-structures

TL;DR: In this article, the conditions of the final release process in oxygen plasma strongly influence the shape of suspended gold micro-structures, and it can be deduced that yield and inelastic relaxation are critical phenomena responsible for most of the deviations from the ideal planar shape of MEMS structures.
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Development of a low-power thick-film gas sensor deposited by screen-printing technique onto a micromachined hotplate

TL;DR: In this article, the authors report on the design, implementation and characterisation of a thick-film gas sensor deposited for the first time by screenprinting technique onto a micromachined hotplate, the microheater maintains a film temperature as high as 400°C with 2 was achieved by computer-aided screen-printing.
Journal ArticleDOI

Bolometric bounds on the antineutrino mass.

TL;DR: High statistics calorimetric measurements of the beta spectrum of 187Re are being performed with arrays of silver perrhenate crystals operated at low temperature with the best fit value for m(2)(nu(e)) is 147+/-237(stat)+/-90(syst) eV(2), which corresponds to an upper limit for the electron antineutrino mass m(nu( e))< or =21.7 eV at 90% C.L.
Proceedings ArticleDOI

A MEMS-Reconfigurable Power Divider on High Resistivity Silicon Substrate

TL;DR: In this paper, the authors presented a MEMS-reconfigurable power divider on high resistivity silicon substrate with variable power ratio, which is based on two cascaded hybrid couplers connected through a tunable phase shifter that produces the required power ratio.