scispace - formally typeset
C

Christopher Liman

Researcher at National Institute of Standards and Technology

Publications -  7
Citations -  164

Christopher Liman is an academic researcher from National Institute of Standards and Technology. The author has contributed to research in topics: Scattering & Photolithography. The author has an hindex of 4, co-authored 7 publications receiving 122 citations.

Papers
More filters
Journal ArticleDOI

Characterizing the Interface Scaling of High χ Block Copolymers near the Order–Disorder Transition

TL;DR: The results of this analysis are correlated with experimentally established limits for the functionality of BCPs in nanopatterning applications and provide guidance for the magnitude of χe needed to achieve small interface width for samples with sub-10 nm L0.
Journal ArticleDOI

Characterizing Patterned Block Copolymer Thin Films with Soft X-rays.

TL;DR: Using a rotational transmission X-ray scattering measurement coupled with soft X-rays to improve contrast between polymer components, the impact of the ratio of the guiding stripe width (W) to the BCP pitch (L0) was investigated.
Journal ArticleDOI

X-ray characterization of contact holes for block copolymer lithography.

TL;DR: In this paper, directed self-assembly of block copolymers (BCPs) is applied to patterning structures with critical dimensions (CDs) which are smaller than can be achieved by traditional photolithography.