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Cornel Bozdog
Researcher at Lehigh University
Publications - 47
Citations - 443
Cornel Bozdog is an academic researcher from Lehigh University. The author has contributed to research in topics: Metrology & Dimensional metrology. The author has an hindex of 11, co-authored 44 publications receiving 420 citations. Previous affiliations of Cornel Bozdog include Weizmann Institute of Science & GlobalFoundries.
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Proceedings ArticleDOI
A holistic metrology approach: hybrid metrology utilizing scatterometry, CD-AFM, and CD-SEM
Alok Vaid,Bin Bin Yan,Yun Tao Jiang,Mark Kelling,Carsten Hartig,John Allgair,Peter Ebersbach,Matthew Sendelbach,Narender Rana,Ahmad D. Katnani,Erin Mclellan,Chas Archie,Cornel Bozdog,Helen Kim,Michael Sendler,Susan Ng,Boris Sherman,Boaz Brill,Igor Turovets,Ronen Urensky +19 more
TL;DR: The Hybrid Metrology approach is defined to be the use of any two or more metrology toolsets in combination to measure the same dataset to optimize metrology recipe and improve measurement performance.
Journal ArticleDOI
Optical detection of electron paramagnetic resonance in electron-irradiated gan
Cornel Bozdog,H. Przybylinska,George D. Watkins,Volker Härle,F. Scholz,M. Mayer,Markus Kamp,Richard J. Molnar,Alma Wickenden,Daniel D. Koleske,R.L. Henry +10 more
TL;DR: In this paper, three optically detected $S = 1/2$ electron paramagnetic resonances (ODEPR) are observed. And two of these display well-resolved hyperfine interaction with a single Ga nucleus, suggesting that they are interstitial Ga related.
Journal ArticleDOI
Intrinsic defects in GaN. I. Ga sublattice defects observed by optical detection of electron paramagnetic resonance
Kim H. Chow,L. S. Vlasenko,P. Johannesen,Cornel Bozdog,George D. Watkins,Akira Usui,Haruo Sunakawa,Chiaki Sasaoka,Masashi Mizuta +8 more
TL;DR: In this article, a broad photoluminescence (PL) band centered at 0.95 eV was identified as interstitial in two different lattice configurations and two tentative models were presented, each of which identifies L5 and L6 with different interstitial sites near the gallium vacancy from which they were created.
Journal ArticleDOI
Holistic metrology approach: hybrid metrology utilizing scatterometry, critical dimension-atomic force microscope and critical dimension-scanning electron microscope
Alok Vaid,Bin Bin Yan,Yun Tao Jiang,Mark Kelling,Carsten Hartig,John Allgair,Peter Ebersbach,Matthew Sendelbach,Narender Rana,Ahmad D. Katnani,Erin Mclellan,Charles N. Archie,Cornel Bozdog,Helen Kim,Michael Sendler,Susan Ng,Boris Sherman,Boaz Brill,Igor Turovets,Ronen Urensky +19 more
TL;DR: This work defines "hybrid metrology" to be the use of any two or more metrology toolsets in combination to measure the same dataset and demonstrates the benefits of the hybrid metrology on two test structures.
Proceedings ArticleDOI
Hybrid metrology solution for 1X node technology
Alok Vaid,Alexander Elia,Mark Kelling,John Allgair,Carsten Hartig,Peter Ebersbach,Erin Mclellan,Matthew Sendelbach,Nedal R. Saleh,Narender Rana,Hiroki Kawada,Toru Ikegami,Masahiko Ikeno,Takahiro Kawasaki,Cornel Bozdog,Helen Kim,Elad Arnon,Roy Koret,Igor Turovets +18 more
TL;DR: This paper extends previous work on HM to measure advanced 1X node layers - EUV and Negative Tone Develop (NTD) resist as well as 3D etch structures such as FinFETs and investigates hybrid calibration of CDSEM to measure in-die resist line height by Pattern Top Roughness (PTR) methodology.