D
D. Rao
Researcher at Intel
Publications - 2
Citations - 100
D. Rao is an academic researcher from Intel. The author has contributed to research in topics: Capacitor & Capacitance. The author has an hindex of 2, co-authored 2 publications receiving 88 citations.
Papers
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Proceedings ArticleDOI
Low-k interconnect stack with multi-layer air gap and tri-metal-insulator-metal capacitors for 14nm high volume manufacturing
Kevin J. Fischer,M. Agostinelli,C. Allen,D. Bahr,M. Bost,P. Charvat,V. Chikarmane,Q. Fu,C. Ganpule,Haran Mohit K,Max M. Heckscher,H. Hiramatsu,E. Hwang,Pulkit Jain,I. Jin,Rahim Kasim,S. Kosaraju,K. S. Lee,Huichu Liu,R. McFadden,S. Nigam,Patel Reken,C. Pelto,P. Plekhanov,M. Prince,Conor P. Puls,S. Rajamani,D. Rao,P. Reese,A. Rosenbaum,Swaminathan Sivakumar,B. Song,Muhammet Uncuer,S. Williams,M. Yang,P. Yashar,Sanjay Natarajan +36 more
TL;DR: In this article, the authors describe Intel's 14nm high-performance logic technology interconnects and back end stack featuring 13 metal layers and a tri-metal laminated metal-insulator-metal (MIM) capacitor.
Proceedings ArticleDOI
Low-k interconnect stack with metal-insulator-metal capacitors for 22nm high volume manufacturing
D. Ingerly,A. Agrawal,R. Ascazubi,A. Blattner,M. Buehler,V. Chikarmane,B. Choudhury,F. Cinnor,C. Ege,C. Ganpule,Timothy E. Glassman,R. Grover,P. Hentges,J. Hicks,David Jones,A. Kandas,H. Khan,N. Lazo,K. S. Lee,H. Liu,A. Madhavan,R. McFadden,T. Mule,D. Parsons,P. Parthangal,Sudarshan Rangaraj,D. Rao,J. Roesler,A. Schmitz,Manvi Sharma,J. Shin,Y. Shusterman,N. Speer,P. Tiwari,Guotao Wang,P. Yashar,Kaizad Mistry +36 more
TL;DR: In this paper, the authors describe interconnect features for Intel's 22nm high-performance logic technology, with metal-insulator-metal capacitors and nine layers of interconnects.