D
Douglas Van Camp
Researcher at Lawrence Berkeley National Laboratory
Publications - 1
Citations - 43
Douglas Van Camp is an academic researcher from Lawrence Berkeley National Laboratory. The author has contributed to research in topics: Photomask & Extreme ultraviolet lithography. The author has an hindex of 1, co-authored 1 publications receiving 40 citations.
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Proceedings ArticleDOI
Commissioning an EUV mask microscope for lithography generations reaching 8 nm
Kenneth A. Goldberg,Iacopo Mochi,Markus P. Benk,Arnaud P. Allezy,M.R. Dickinson,Carl Cork,Daniel Zehm,James Macdougall,Erik H. Anderson,Farhad Salmassi,W. Chao,Vamsi Vytla,Eric M. Gullikson,Jason DePonte,M. S. Gideon Jones,Douglas Van Camp,Jeffrey F. Gamsby,William B. Ghiorso,Hanjing Huang,William Cork,Elizabeth Martin,Eric Van Every,Eric Acome,Veljko Milanovic,Rene Delano,Patrick P. Naulleau,Senajith Rekawa +26 more
TL;DR: The SEMATECH High-NA Actinic Reticle review Project (SHARP) is a synchrotron-based, EUV-wavelength microscope, dedicated to photomask imaging, now being commissioned at Lawrence Berkeley National Laboratory.