V
Vamsi Vytla
Researcher at Lawrence Berkeley National Laboratory
Publications - 3
Citations - 56
Vamsi Vytla is an academic researcher from Lawrence Berkeley National Laboratory. The author has contributed to research in topics: Photomask & Extreme ultraviolet lithography. The author has an hindex of 2, co-authored 2 publications receiving 53 citations.
Papers
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Proceedings ArticleDOI
Commissioning an EUV mask microscope for lithography generations reaching 8 nm
Kenneth A. Goldberg,Iacopo Mochi,Markus P. Benk,Arnaud P. Allezy,M.R. Dickinson,Carl Cork,Daniel Zehm,James Macdougall,Erik H. Anderson,Farhad Salmassi,W. Chao,Vamsi Vytla,Eric M. Gullikson,Jason DePonte,M. S. Gideon Jones,Douglas Van Camp,Jeffrey F. Gamsby,William B. Ghiorso,Hanjing Huang,William Cork,Elizabeth Martin,Eric Van Every,Eric Acome,Veljko Milanovic,Rene Delano,Patrick P. Naulleau,Senajith Rekawa +26 more
TL;DR: The SEMATECH High-NA Actinic Reticle review Project (SHARP) is a synchrotron-based, EUV-wavelength microscope, dedicated to photomask imaging, now being commissioned at Lawrence Berkeley National Laboratory.
Proceedings ArticleDOI
The SEMATECH high-NA actinic reticle review project (SHARP) EUV mask-imaging microscope
Kenneth A. Goldberg,Iacopo Mochi,Markus P. Benk,Chihcheng Lin,Arnaud P. Allezy,M.R. Dickinson,Carl Cork,James Macdougall,Erik H. Anderson,Weilun Chao,Farhad Salmassi,Eric M. Gullikson,Daniel Zehm,Vamsi Vytla,William Cork,Jason DePonte,Gino Picchi,Ahmet Pekedis,Takeshi Katayanagi,Michael S. Jones,Elizabeth Martin,Patrick P. Naulleau,Senajith Rekawa +22 more
TL;DR: The SEMATECH High Numerical Aperture Actinic Reticle Review Project (SHARP) is a newly commissioned,synchrotron-based extreme ultraviolet (EUV) microscope dedicated to photomask research as mentioned in this paper.
Journal ArticleDOI
Newad: A register map automation tool for Verilog
TL;DR: In this paper , the authors present a tool that scours native HDL source files and looks for specific language-supported attributes and automatically generates a register map and bus decoders, respecting multiple clock domains, and presents a JSON file to the network that maps register names to addresses.