Showing papers by "Enakshi Bhattacharya published in 2003"
TL;DR: In this paper, an enzymatic, porous silicon (PS) based potentiometric method for estimating triglycerides is reported, where Lipase, an enzyme which hydrolyses triglycerides was immobilised on PS which was prepared from p-type (1 − 0 − 0) crystalline silicon and was thermally oxidized.
42 citations
14 Oct 2003
TL;DR: In this article, the design and fabrication of polysilicon piezoresistive pressure sensor are presented, and the results obtained on the pressure sensors and the temperature coefficient of resistivity of poly-silicon resistors are presented.
Abstract: In this paper, the design and fabrication of polysilicon piezoresistive pressure sensor are presented. The design considerations such as the membrane thickness and the arrangement pattern of polysilicon piezo-resistors on the membrane are discussed with emphasis on the use of SOI approach. The results obtained on the pressure sensors and the temperature coefficient of resistivity of polysilicon resistors are presented. The results presented include the electrical trimming of polysilicon resistors for compensating zero offset voltage in the pressure sensors.
1 citations
14 Oct 2003
TL;DR: In this paper, contact angle measurements on polysilicon surface after different treatments are reported with a view to understand their stiction behavior, and they also report on surface roughness measurements on these samples.
Abstract: Polysilicon layers deposited by Low Pressure Chemical Vapour Deposition (LPCVD) on sacrificial oxides are used for surface micromachined structures. Stiction is a major problem in surface micromachining both during processing and in use. Contact angle measurements on surfaces can give indication on the adhesivitiy of the surface. In this paper, contact angle measurements on polysilicon surface after different treatments are reported with a view to understand their stiction behavior. We also report on surface roughness measurements on these samples.
1 citations