Showing papers by "Enakshi Bhattacharya published in 2005"
TL;DR: In this paper, a silicon nitride-based EISCAP was used for the first time to detect triglycerides and urea, and the sensor was able to detect millimolar concentrations of the bioanalytes (tributyrin/urea).
Abstract: We report fabrication of a potentiometric biosensor on silicon for the estimation of tributyrin and urea based on enzymatic reactions. The sensor is an electrolyte–insulator–semiconductor capacitor (EISCAP) that shows a shift in the measured C–V with changes in the pH of the electrolyte. This pH shift can be induced by the enzyme-mediated hydrolysis of tributyrin and urea which results in acidic and basic solutions, respectively and an EISCAP can be effectively used for the detection of these bioanalytes. A silicon nitride based EISCAP was used for the first time to detect triglycerides and urea. The sensor was able to detect millimolar concentrations of the bioanalytes (tributyrin/urea). The most important features of the tributyrin and urea sensor are high sensitivity, long life-time, easily built at a low cost, micro-construction and short response time. Optimization of the conditions for the enzymatic reaction and calibration of the sensor are included.
42 citations
TL;DR: In this article, the authors discuss roughening of the surface of polysilicon, which forms the structural layer in surface micromachining, by the formation of porous silicon and its effect on stiction.
Abstract: Stiction, or adhesion of components to one another, is a major failure mechanism in surface micromachined MEMS. In this paper we discuss roughening of the surface of polysilicon, which forms the structural layer in surface micromachining, by the formation of porous silicon and its effect on stiction. The adhesivity of the surface is investigated by measurements of contact angle and the roughness is measured by a surface profiler. Measurements to estimate stiction on surface micromachined cantilevers and accelerometers are reported.
8 citations