Journal ArticleDOI
Effect of porous silicon formation on stiction in surface micromachined MEMS structures
Enakshi Bhattacharya,Helen Anitha Rani,U. Venu Babu,Parimi Ramaseshagiri Rao,K.N. Bhat,Jack Martin +5 more
TLDR
In this article, the authors discuss roughening of the surface of polysilicon, which forms the structural layer in surface micromachining, by the formation of porous silicon and its effect on stiction.Abstract:
Stiction, or adhesion of components to one another, is a major failure mechanism in surface micromachined MEMS. In this paper we discuss roughening of the surface of polysilicon, which forms the structural layer in surface micromachining, by the formation of porous silicon and its effect on stiction. The adhesivity of the surface is investigated by measurements of contact angle and the roughness is measured by a surface profiler. Measurements to estimate stiction on surface micromachined cantilevers and accelerometers are reported.read more
Citations
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Journal ArticleDOI
Estimation of Stiction Force From Electrical and Optical Measurements on Cantilever Beams
TL;DR: In this article, the authors estimate the stiction force from electrical measurements on surface micromachined polysilicon cantilever beams in terms of the pull-in and pull-out voltages.
Patent
MEMS Device with Surface Having a Low Roughness Exponent
TL;DR: In this paper, the backplate has a backplate surface and the diaphragm has a diaphrasm surface that faces the back-plate surface, and at least one of the backface surface and diaphram surface has at least a portion with a Hurst exponent less than or equal to about 0.5.
Journal ArticleDOI
Synthesis of mesoporous silicon directly from silicalite-1 single crystals and its response to thermal diffusion of ZnO clusters
TL;DR: In this article, the preparation of mesoporous silicon granules with a layered structure directly from silicalite-1 single crystals was described, where the ZnO clusters were loaded into the porous silicon granule by thermal diffusion method.
Proceedings ArticleDOI
Stiction force estimation from attachment length and electrostatic measurements on cantilever beams
TL;DR: In this article, an analytical model is developed to calculate the stiction force from the attachment length of long stuck cantilever beams that are released in the same process, using only measured values of pullin and pullout voltages and the beam length and does not require the value of Young's modulus.
References
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Journal ArticleDOI
Critical Review: Adhesion in surface micromechanical structures
Roya Maboudian,Roger T. Howe +1 more
TL;DR: In this paper, the authors present a review on the state of knowledge of surface phenomena behind adhesion in surface micromechanical structures, including surface roughening and chemical modification of polycrystalline silicon surfaces.
Journal ArticleDOI
Stiction in surface micromachining
TL;DR: In this article, four major adhesion mechanisms have been analyzed: capillary forces, hydrogen bridging, electrostatic forces and van der Waals forces, and they have been successfully reduced.
Journal ArticleDOI
Accurate method for determining adhesion of cantilever beams
M. P. de Boer,Terry A. Michalske +1 more
TL;DR: In this paper, the authors demonstrate the accurate measurement of cantilever beam adhesion by using test structures which are adhered over long attachment lengths, and they show that this configuration has a deep energy well, such that a fracture equilibrium is easily reached.
Journal ArticleDOI
Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms
TL;DR: In this article, the authors investigated the mechanisms causing stiction of polysilicon structures fabricated by surface micromachining techniques and found that during drying from rinse liquids attractive dynamic capillary forces are responsible for bringing micromechanical structures into contact with the underlying substrate.
Journal ArticleDOI
Microstructural investigations of light‐emitting porous Si layers
T. George,Mark S. Anderson,William T. Pike,True-Lon Lin,Robert W. Fathauer,K. H. Jung,D. L. Kwong +6 more
TL;DR: The structural and morphological characteristics of visible-light-emitting porous Si layers produced by anodic and stain etching of single-crystal Si substrates are compared using transmission electron microscopy and atomic force microscopy (AFM) as discussed by the authors.