This review reports the progress on the recent development of micromixers. The review first presents the different micromixer types and designs. Micromixers in this review are categorized as passive micromixers and active micromixers. Due to the simple fabrication technology and the easy implementation in a complex microfluidic system, passive micromixers will be the focus of this review. Next, the review discusses the operation points of the micromixers based on characteristic dimensionless numbers such as Reynolds number Re, Peclet number Pe, and in dynamic cases the Strouhal number St. The fabrication technologies for different mixer types are also analysed. Quantification techniques for evaluation of the performance of micromixers are discussed. Finally, the review addresses typical applications of micromixers.

https://iopscience.iop.org/article/10.1088/0960-1317/15/2/R01/pdf

Micromixers?a review

Nanotechnology is the science of understanding matter and the control of matter at dimensions of 100 nm or less. Encompassing nanoscale science, engineering, and technology, nanotechnology involves imaging, measuring, modeling, and manipulation of matter at this level of precision. An important aspect of research in nanotechnology involves precision control and manipulation of devices and materials at a nanoscale, i.e., nanopositioning. Nanopositioners are precision mechatronic systems designed to move objects over a small range with a resolution down to a fraction of an atomic diameter. The desired attributes of a nanopositioner are extremely high resolution, accuracy, stability, and fast response. The key to successful nanopositioning is accurate position sensing and feedback control of the motion. This paper presents an overview of nanopositioning technologies and devices emphasizing the key role of advanced control techniques in improving precision, accuracy, and speed of operation of these systems.

/pdf/a-survey-of-control-issues-in-nanopositioning-1zgjre9s1l.pdf

A Survey of Control Issues in Nanopositioning

This article reviews acoustic microfiuidics: the use of acoustic fields, principally ultrasonics, for application in microfiuidics. Although acoustics is a classical field, its promising, and indeed perplexing, capabilities in powerfully manipulating both fluids and particles within those fluids on the microscale to nanoscale has revived interest in it. The bewildering state of the literature and ample jargon from decades of research is reorganized and presented in the context of models derived from first principles. This hopefully will make the area accessible for researchers with experience in materials science, fluid mechanics, or dynamics. The abundance of interesting phenomena arising from nonlinear interactions in ultrasound that easily appear at these small scales is considered, especially in surface acoustic wave devices that are simple to fabricate with planar lithography techniques common in microfluidics, along with the many applications in microfluidics and nanofluidics that appear through the literature.

/pdf/microscale-acoustofluidics-microfluidics-driven-via-5bet39j13p.pdf

Microscale acoustofluidics: Microfluidics driven via acoustics and ultrasonics

The aim of microfluidic mixing is to achieve a thorough and rapid mixing of multiple samples in microscale devices. In such devices, sample mixing is essentially achieved by enhancing the diffusion effect between the different species flows. Broadly speaking, microfluidic mixing schemes can be categorized as either “active”, where an external energy force is applied to perturb the sample species, or “passive”, where the contact area and contact time of the species samples are increased through specially-designed microchannel configurations. Many mixers have been proposed to facilitate this task over the past 10 years. Accordingly, this paper commences by providing a high level overview of the field of microfluidic mixing devices before describing some of the more significant proposals for active and passive mixers.

/pdf/microfluidic-mixing-a-review-3egj61w5ox.pdf

Microfluidic Mixing: A Review

The ability to tailor the chemical composition and structure of a surface at the sub-100-nm length scale is important for studying topics ranging from molecular electronics to materials assembly, and for investigating biological recognition at the single biomolecule level. Dip-pen nanolithography (DPN) is a scanning probe microscopy-based nanofabrication technique that uniquely combines direct-write soft-matter compatibility with the high resolution and registry of atomic force microscopy (AFM), which makes it a powerful tool for depositing soft and hard materials, in the form of stable and functional architectures, on a variety of surfaces. The technology is accessible to any researcher who can operate an AFM instrument and is now used by more than 200 laboratories throughout the world. This article introduces DPN and reviews the rapid growth of the field of DPN-enabled research and applications over the past several years.

Applications of dip-pen nanolithography.

We present a 4 mm2 image taken with a parallel array of 10 cantilevers, an image spanning 6.4 mm taken with 32 cantilevers, and lithography over a 100 mm2 area using an array of 50 cantilevers. All of these results represent scan areas that are orders of magnitude larger than that of a typical atomic force microscope (0.01 mm2). Previously, the serial nature and limited scan size of the atomic force microscope prevented large scale imaging. Our design addresses these issues by using a modular micromachined parallel atomic force microscope array in conjunction with large displacement scanners. High-resolution microscopy and lithography over large areas are important for many applications, but especially in microelectronics, where integrated circuit chips typically have nanometer scale features distributed over square centimeter areas.

/pdf/centimeter-scale-atomic-force-microscope-imaging-and-12hxrr6k1g.pdf

Centimeter scale atomic force microscope imaging and lithography

conventional cantilever used in the atomic force microscope ~AFM!. In this paper we present a detailed analysis of the interdigital cantilever and its use as a sensor for the AFM. In this study, we combine finite element analysis with diffraction theory to simulate the mechanically induced optical response of the ID. This model is used to compare this system with the optical lever detector as used in conventional instruments by analyzing the ratio of signal to noise and overall performance. We find that optical detection of the cantilever motion with interdigital fingers has two advantages. When used in conjunction with arrays of cantilevers it is far easier to align. More importantly, it is immune to laser pointing noise and thermally excited mechanical vibrations and this improves the sensitivity as compared to the optical lever. © 1998 American Institute of Physics. @S0021-8979~98!07112-6#

/pdf/analysis-and-design-of-an-interdigital-cantilever-as-a-q85vj4yj02.pdf

Analysis and design of an interdigital cantilever as a displacement sensor

Increasing the imaging speed of tapping mode atomic force microscopy (AFM) has important practical and scientific applications. The scan speed of tapping-mode AFMs is limited by the speed of the feedback loop that maintains a constant tapping amplitude. This article seeks to illuminate these limits to scanning speed. The limits to the feedback loop are: (1) slow transient response of probe; (2) instability limitations of high-quality factor (Q) systems; (3) feedback actuator bandwidth; (4) error signal saturation; and the (5) rms-to-dc converter. The article will also suggest solutions to mitigate these limitations. These limitations can be addressed through integrating a faster feedback actuator as well as active control of the dynamics of the cantilever.

Characterization and optimization of scan speed for tapping-mode atomic force microscopy

In this study, we examine the use of capacitive micromachined ultrasonic transducers (CMUTs) with vacuum- sealed cavities for transmitting directional sound with parametric arrays. We used finite element modeling to design CMUTs with 40-mum- and 60-mum-thick membranes to have resonance frequencies of 46 kHz and 54 kHz, respectively. The wafer bonding approach used to fabricate the CMUTs provides good control over device properties and the capability to fabricate CMUTs with large diameter membranes and deep cavities. Each CMUT is 8 cm in diameter and consists of 284 circular membranes. Each membrane is 4 mm in diameter. Characterization of the fabricated CMUTs shows they have center frequencies of 46 kHz and 55 kHz and 3 dB bandwidths of 1.9 kHz and 5.3 kHz for the 40-mum- and 60-mum-thick membrane devices, respectively. With dc bias voltages of 380 V and 350 V and an ac excitation of 200 V peak-to-peak, the CMUTs generate average sound pressure levels, normalized to the device's surface, of 135 dB and 129 dB (re 20 muPa), respectively. When used to generate 5 kHz sound with a parametric array, we measured sound at 3 m with a 6 dB beamwidth of 8.7deg and a sound pressure level of 58 dB. To understand how detector nonlinearity (e.g., the nonlinearity of the microphone used to make the sound level measurements) affects the measured sound pressure level, we made measurements with and without an acoustic low-pass filter placed in front of the microphone; the measured sound levels agree with numerical simulations of the pressure field. The results presented in this paper demonstrate that large-area CMUTs, which produce high-intensity ultrasound, can be fabricated for transmitting directional sound with parametric arrays.

50 kHz capacitive micromachined ultrasonic transducers for generation of highly directional sound with parametric arrays

We present a micromachined scanning probe cantilever, in which a specific higher-order flexural mode is designed to be resonant at an exact integer multiple of the fundamental resonance frequency. We have fabricated such cantilevers by reducing the stiffness of the third order flexural mode relative to the fundamental mode, and we have demonstrated that these cantilevers enable sensing of non-linear mechanical interactions between the atomically sharp tip at the free end of the cantilever and a surface with unknown mechanical properties in tapping-mode atomic force microscopy. Images of surfaces with large topographical variations show that for such samples harmonic imaging has better resolution than standard tapping-mode imaging.

/pdf/high-resolution-imaging-of-elastic-properties-using-harmonic-1v0avddk68.pdf

Goksen G. Yaralioglu

Papers

Centimeter scale atomic force microscope imaging and lithography

Analysis and design of an interdigital cantilever as a displacement sensor

Characterization and optimization of scan speed for tapping-mode atomic force microscopy

50 kHz capacitive micromachined ultrasonic transducers for generation of highly directional sound with parametric arrays

High-resolution imaging of elastic properties using harmonic cantilevers