H
H. G. Busmann
Researcher at Fraunhofer Society
Publications - 4
Citations - 368
H. G. Busmann is an academic researcher from Fraunhofer Society. The author has contributed to research in topics: Diamond & Material properties of diamond. The author has an hindex of 3, co-authored 4 publications receiving 361 citations. Previous affiliations of H. G. Busmann include Argonne National Laboratory.
Papers
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Journal ArticleDOI
Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices
Alan R. Krauss,Orlando Auciello,Dieter M. Gruen,Ahalapitiya H. Jayatissa,Anirudha V. Sumant,J. Tucek,Derrick C. Mancini,Nicolaie Moldovan,Ali Erdemir,Daniel Ersoy,Michael N. Gardos,H. G. Busmann,E. M. Meyer,M. Q. Ding +13 more
TL;DR: A major problem with the Si-based MEMS technology is that Si has poor mechanical and tribological properties as discussed by the authors, which makes it unsuitable for MEMS devices, and therefore it is not suitable for them.
Journal ArticleDOI
Fabrication of MEMS components based on ultrananocrystalline diamond thin films and characterization of mechanical properties.
Anirudha V. Sumant,Orlando Auciello,Alan R. Krauss,Dieter M. Gruen,D. Ersoy,J. Tucek,Ahalapitiya H. Jayatissa,Eric A. Stach,Nicolaie Moldovan,Derrick C. Mancini,H. G. Busmann,E. M. Meyer +11 more
TL;DR: In this paper, a phase-pure ultrananocrystalline diamond (UNCD) films for the fabrication of MEMS components were generated by microwave plasma CVD using C60-Ar or CH4-Ar plasmas, resulting in films that have 3-5 nm grain size.
Journal ArticleDOI
Two- and three-dimensional ultrananocrystalline diamond (UNCD) structures for a high resolution diamond-based MEMS technology.
Orlando Auciello,Alan R. Krauss,Dieter M. Gruen,E. M. Meyer,H. G. Busmann,J. Tucek,Anirudha V. Sumant,Ahalapitiya H. Jayatissa,Nicolai A. Moldovan,Derrick C. Mancini,Michael N. Gardos +10 more
TL;DR: In this article, the authors demonstrate the fabrication of 2-D and 3-D phase-pure ultrananocrystalline diamond (UNCD) MEMS components by coating Si with UNCD films, coupled with lithographic patterning methods involving sacrificial release layers.
Science and technology of ultrananocrystalline diamond (UNCD) thin films for multifunctional devices
Orlando Auciello,Dieter M. Gruen,Alan R. Krauss,Ahalapitiya H. Jayatissa,Anirudha V. Sumant,J. Tucek,Derrick C. Mancini,Nicolaie Moldovan,Ali Erdemir,D. Ersoy,Michael N. Gardos,H. G. Busmann,E. M. Meyer +12 more
TL;DR: In this paper, a thin film deposition process has been developed that produces phase-pure ultrananocrystalline diamond (UNCD) with morphological and mechanical properties that are ideally suited for MEMS applications in general, and MMA use in particular.