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Journal ArticleDOI

Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

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TLDR
A major problem with the Si-based MEMS technology is that Si has poor mechanical and tribological properties as discussed by the authors, which makes it unsuitable for MEMS devices, and therefore it is not suitable for them.
About
This article is published in Diamond and Related Materials.The article was published on 2001-11-01. It has received 351 citations till now. The article focuses on the topics: Precision engineering & Microelectromechanical systems.

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Citations
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Journal ArticleDOI

Metal-free catalysts for oxygen reduction reaction.

TL;DR: This paper presents a probabilistic procedure for estimating the polymethine content of carbon dioxide using a straightforward two-step procedure, and shows good results in both the stationary and the liquid phase.
Journal ArticleDOI

Nanocrystalline materials and coatings

TL;DR: In this paper, a review of the current developments in fabrication, microstructure, physical and mechanical properties of nanocrystalline materials and coatings is addressed. And the properties of transition metal nitride nanocrystine films formed by ion beam assisted deposition process.
Journal ArticleDOI

Materials: Ultrahard polycrystalline diamond from graphite.

TL;DR: Surprisingly, this synthesized polycrystalline diamond is ultrahard and so could be useful in the manufacture of scientific and industrial tools.
Journal ArticleDOI

Ultrahard nanotwinned cubic boron nitride.

TL;DR: It is shown that hardening of cBN is continuous with decreasing twin thickness down to the smallest sizes investigated, contrasting with the expected reverse Hall–Petch effect below a critical grain size or the twin thickness of ∼10–15 nm found in metals and alloys.
Journal ArticleDOI

Enhanced diamond nucleation on monodispersed nanocrystalline diamond

TL;DR: In this paper, a method for improving the nucleation density of nanocrystalline diamond growth is demonstrated, where detonation nanodiamond powder was bead-milled and processed to stable aqueous colloid of core particles.
References
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Journal ArticleDOI

Vapor growth of diamond on diamond and other surfaces

TL;DR: In this article, the growth rate of homoepitaxial diamond films reached 1 μm/h at 1000°C; film properties were identical to those of bulk crystals.
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Fullerenes as precursors for diamond film growth without hydrogen or oxygen additions

TL;DR: In this article, the growth of diamond films using fullerene precursors in an argon microwave plasma was reported, a unique development achieved without the addition of hydrogen or oxygen, and it was speculated that collisional fragmentation of C60 to give C2 could be responsible for the high growth rate of the very fine-grained diamond films.
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Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond

TL;DR: In this article, a process for making thick, stress-free, amorphous-tetrahedrally bonded carbon (a-tC) films with hardness and stiffness near that of diamond was developed.
BookDOI

Tribology Issues and Opportunities in MEMS

TL;DR: The first € price and the £ and $ price are net prices, subject to local VAT as discussed by the authors, and they are subject to change without notice. All prices exclusive of carriage charges.
Journal ArticleDOI

Growth on the reconstructed diamond (100) surface

TL;DR: In this article, a thermochemical kinetics analysis has been carried out for growth on the (100)-(2xl):H diamond surface using a pair of previously proposed mechanisms which operate sequentially.
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