Hans-Ulrich Danzebrink

TL;DR: In this paper, the authors describe a metrological large range scanning probe microscope (LR-SPM) with an Abbe error free design and direct interferometric position measurement capability, aimed at traceable topographic measurements that require nanometer accuracy.

TL;DR: In this paper, the calibration of 1D and 2D gratings is performed using a metrological large range scanning probe microscope with optimized measurement strategies, and two different kinds of data evaluation methods, a gravity center method and a Fourier transform method, are developed and investigated.

TL;DR: This review paper summarizes the European nanometrology landscape from a technical perspective with a review of current status, the capabilities and limitations of current techniques and instruments, and future directions being driven by emerging industrial measurement requirements.

TL;DR: An approach to establishing rigorous nano-and microdimensional metrology using scanning probe microscopes (SPMs) and metrological profilometers is presented in this article, where an overview on calibrations of nanostructures such as step height, one-and two-dimensional gratings, feature width, nanoroughness and geometry of a nanohardness indenter is given.

TL;DR: In this article, a coordinate measuring system based on a nano positioning and measuring machine (NMM) has been built to satisfy various demands of micro-and nanoscale-dimensional metrology, and the design ideas concerning the key components of the CMM, such as positioning stage, probe and software are introduced.