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J. L. Shohet

Researcher at University of Wisconsin-Madison

Publications -  149
Citations -  1636

J. L. Shohet is an academic researcher from University of Wisconsin-Madison. The author has contributed to research in topics: Dielectric & Plasma. The author has an hindex of 21, co-authored 148 publications receiving 1550 citations.

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Measurement of bandgap energies in low-k organosilicates

TL;DR: In this paper, experimental measurements of the electronic band gap of low-k organosilicate dielectrics are presented and discussed, by examining the onset of inelastic energy loss in core level atomic spectra using X-ray photoelectron spectroscopy.
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Plasma-aided manufacturing

TL;DR: Plasma-aided manufacturing has direct applications to semiconductor fabrication, materials synthesis, welding, lighting, polymers, anticorrosion coatings, machine tools, metallurgy, electrical and electronics devices, hazardous waste removal, high-performance ceramics, and many other items in both the high-technology and the more traditional industries in the United States as discussed by the authors.
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Measurement of ion flows using an ‘‘unmagnetized’’ Mach probe in the interchangeable module stellarator

TL;DR: A simple geometric model of the IMS Mach probe shows that the variation of the effective probe area as a function of the probe orientation with respect to the magnetic field is 20% -25, predicting the probe to be only slightly magnetized as mentioned in this paper.
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Plasma vacuum ultraviolet emission in an electron cyclotron resonance etcher

TL;DR: In this article, the vacuum ultraviolet (VUV) emission from various feed gases producing plasmas in an electron cyclotron resonance etcher was investigated and the reported level of VUV emission was sufficient to induce radiation damage in typical metaloxide-semiconductor devices in the form of flatband voltage shift and inversion of lightly doped substrates.
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The effects of vacuum ultraviolet radiation on low-k dielectric films

TL;DR: In this paper, the porosity of low-k organosilicate glass (SiCOH) dielectric was modelled to reduce trapped-charge accumulation during processing of SiCOH dielectrics.