J
J. L. Shohet
Researcher at University of Wisconsin-Madison
Publications - 149
Citations - 1636
J. L. Shohet is an academic researcher from University of Wisconsin-Madison. The author has contributed to research in topics: Dielectric & Plasma. The author has an hindex of 21, co-authored 148 publications receiving 1550 citations.
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Journal ArticleDOI
Measurement of bandgap energies in low-k organosilicates
M. T. Nichols,Weiyi Li,Dongfei Pei,George Andrew Antonelli,Qinghuang Lin,Samer Banna,Yoshio Nishi,J. L. Shohet +7 more
TL;DR: In this paper, experimental measurements of the electronic band gap of low-k organosilicate dielectrics are presented and discussed, by examining the onset of inelastic energy loss in core level atomic spectra using X-ray photoelectron spectroscopy.
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Plasma-aided manufacturing
TL;DR: Plasma-aided manufacturing has direct applications to semiconductor fabrication, materials synthesis, welding, lighting, polymers, anticorrosion coatings, machine tools, metallurgy, electrical and electronics devices, hazardous waste removal, high-performance ceramics, and many other items in both the high-technology and the more traditional industries in the United States as discussed by the authors.
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Measurement of ion flows using an ‘‘unmagnetized’’ Mach probe in the interchangeable module stellarator
TL;DR: A simple geometric model of the IMS Mach probe shows that the variation of the effective probe area as a function of the probe orientation with respect to the magnetic field is 20% -25, predicting the probe to be only slightly magnetized as mentioned in this paper.
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Plasma vacuum ultraviolet emission in an electron cyclotron resonance etcher
C. Cismaru,J. L. Shohet +1 more
TL;DR: In this article, the vacuum ultraviolet (VUV) emission from various feed gases producing plasmas in an electron cyclotron resonance etcher was investigated and the reported level of VUV emission was sufficient to induce radiation damage in typical metaloxide-semiconductor devices in the form of flatband voltage shift and inversion of lightly doped substrates.
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The effects of vacuum ultraviolet radiation on low-k dielectric films
H. Sinha,He Ren,M. T. Nichols,J. L. Lauer,M. Tomoyasu,N. M. Russell,G. Jiang,George Andrew Antonelli,Nicholas C. M. Fuller,Sebastian Engelmann,Qinghuang Lin,Vanessa Ryan,Yoshio Nishi,J. L. Shohet +13 more
TL;DR: In this paper, the porosity of low-k organosilicate glass (SiCOH) dielectric was modelled to reduce trapped-charge accumulation during processing of SiCOH dielectrics.