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James W. Mayer

Researcher at Arizona State University

Publications -  405
Citations -  21570

James W. Mayer is an academic researcher from Arizona State University. The author has contributed to research in topics: Silicon & Ion implantation. The author has an hindex of 74, co-authored 405 publications receiving 21245 citations. Previous affiliations of James W. Mayer include Los Alamos National Laboratory & University of California, San Diego.

Papers
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Journal ArticleDOI

Low power electronics and pulsed laser processing

TL;DR: Silicon-on-insulator structures can be made by high dose implantation, and Si-doping in selected regions can be achieved with pulsed excimer lasers.
Book ChapterDOI

Dependence of Residual Damage in “Through-Oxide” Implants on Substrate Orientation and Anneal Sequence

TL;DR: In this article, channeling analysis of 200 keV 75As “throughoxide” implants in crystalline silicon at a dose level of 1016 ions/cm2 indicate that the orientation of the silicon, the substrate temperature during implantation, and the anneal procedure all influence the amount of residual disorder.