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James W. Mayer

Researcher at Arizona State University

Publications -  405
Citations -  21570

James W. Mayer is an academic researcher from Arizona State University. The author has contributed to research in topics: Silicon & Ion implantation. The author has an hindex of 74, co-authored 405 publications receiving 21245 citations. Previous affiliations of James W. Mayer include Los Alamos National Laboratory & University of California, San Diego.

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Selective deposition of tungsten on TiSi2

TL;DR: An improved process for preparing selective deposition of conductive metals on disilicide encroachment barriers allows the construction of integrated circuit components wherein the metal/disilicide interface is substantially free of O and/or F contamination as mentioned in this paper.
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Grain size dependence in a self‐implanted silicon layer on laser irradiation energy density

TL;DR: In this article, the transformation of amorphous Si layers to polycrystalline material induced by Q-switched ruby laser single pulses of 20 and 50 nsec duration has been investigated.
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TEMPERATURE DEPENDENCE OF LATTICE DISORDER CREATED IN Si BY 40 keV Sb IONS

TL;DR: In this paper, the temperature dependence of lattice disorder created in Si by 40-keV Sb ions was studied by energy analysis of the yield of backscattered 1-MeV He ions incident along 〈111〉 and 》110〉 axes.
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Formation and characterization of silicon films on flexible polymer substrates

TL;DR: In this article, an 800-nm layer of amorphous silicon was deposited on a polyimide substrate followed by 20-nm layers of aluminum, forming silicon nanocrystallites.