J
James W. Mayer
Researcher at Arizona State University
Publications - 405
Citations - 21570
James W. Mayer is an academic researcher from Arizona State University. The author has contributed to research in topics: Silicon & Ion implantation. The author has an hindex of 74, co-authored 405 publications receiving 21245 citations. Previous affiliations of James W. Mayer include Los Alamos National Laboratory & University of California, San Diego.
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Selective deposition of tungsten on TiSi2
TL;DR: An improved process for preparing selective deposition of conductive metals on disilicide encroachment barriers allows the construction of integrated circuit components wherein the metal/disilicide interface is substantially free of O and/or F contamination as mentioned in this paper.
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Grain size dependence in a self‐implanted silicon layer on laser irradiation energy density
TL;DR: In this article, the transformation of amorphous Si layers to polycrystalline material induced by Q-switched ruby laser single pulses of 20 and 50 nsec duration has been investigated.
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TEMPERATURE DEPENDENCE OF LATTICE DISORDER CREATED IN Si BY 40 keV Sb IONS
TL;DR: In this paper, the temperature dependence of lattice disorder created in Si by 40-keV Sb ions was studied by energy analysis of the yield of backscattered 1-MeV He ions incident along 〈111〉 and 》110〉 axes.
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Formation and characterization of silicon films on flexible polymer substrates
Pramod K Shetty,N. D. Theodore,Jie Ren,Jose Menendez,H. C. Kim,E. Misra,James W. Mayer,Terry Alford +7 more
TL;DR: In this article, an 800-nm layer of amorphous silicon was deposited on a polyimide substrate followed by 20-nm layers of aluminum, forming silicon nanocrystallites.
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Plasma hydrogenation of strained Si∕SiGe∕Si heterostructure for layer transfer without ion implantation
Lin Shao,Y. Lin,Jung-Kun Lee,Q. X. Jia,Yongqiang Wang,Michael Nastasi,Phillip E. Thompson,N. David Theodore,Paul K. Chu,T. L. Alford,James W. Mayer,Peng Chen,S. S. Lau +12 more
TL;DR: In this article, a strain-facilitated layer transfer is proposed, which avoids irradiation damage within the top Si layer that typically results from ion implantation used to create H trapping regions in the conventional ion-cut method.