J
Joy Cheng
Researcher at TSMC
Publications - 135
Citations - 7679
Joy Cheng is an academic researcher from TSMC. The author has contributed to research in topics: Layer (electronics) & Photoresist. The author has an hindex of 41, co-authored 135 publications receiving 7446 citations. Previous affiliations of Joy Cheng include IBM & Massachusetts Institute of Technology.
Papers
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Journal ArticleDOI
Templated Self‐Assembly of Block Copolymers: Top‐Down Helps Bottom‐Up
TL;DR: Templated self-assembly of block copolymers as discussed by the authors provides a path towards the rational design of hierarchical device structures with periodic features that cover several length scales, and provides a promising route to control bottom-up self-organization processes through top-down lithographic templates.
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Nanostructure engineering by templated self-assembly of block copolymers.
TL;DR: This study investigates the formation of defects in a self-assembled array of spherical block-copolymer microdomains, using topographical templates to control the local self-assembly.
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Formation of a Cobalt Magnetic Dot Array via Block Copolymer Lithography
Joy Cheng,Caroline A. Ross,Vanessa Z. H. Chan,Edwin L. Thomas,Rob G.H. Lammertink,Rob G.H. Lammertink,Gyula J. Vancso +6 more
TL;DR: In this paper, single-domain cobalt dot arrays with high magnetic particle density are fabricated by self-assembled block copolymer lithography, using a polystyrene-poly(ferrocenyldimethylsilane) copolymers as a template.
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Polymer self assembly in semiconductor microelectronics
Charles T. Black,Ricardo Ruiz,Gregory Breyta,Joy Cheng,Matthew E. Colburn,Kathryn W. Guarini,Hyungjun Kim,Y. Zhang +7 more
TL;DR: Target applications including surface-roughening for on-chip decoupling capacitors, patterning nanocrystal floating gates for FLASH devices, and defining FET channel arrays are discussed.
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Fabrication of nanostructures with long-range order using block copolymer lithography
TL;DR: In this paper, a block copolymer self-assembly method is presented that allows ordered arrays of nanostructures to be formed by spin casting over surfaces patterned with shallow grooves.