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Joy Cheng

Researcher at TSMC

Publications -  135
Citations -  7679

Joy Cheng is an academic researcher from TSMC. The author has contributed to research in topics: Layer (electronics) & Photoresist. The author has an hindex of 41, co-authored 135 publications receiving 7446 citations. Previous affiliations of Joy Cheng include IBM & Massachusetts Institute of Technology.

Papers
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Templated Self‐Assembly of Block Copolymers: Top‐Down Helps Bottom‐Up

TL;DR: Templated self-assembly of block copolymers as discussed by the authors provides a path towards the rational design of hierarchical device structures with periodic features that cover several length scales, and provides a promising route to control bottom-up self-organization processes through top-down lithographic templates.
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Nanostructure engineering by templated self-assembly of block copolymers.

TL;DR: This study investigates the formation of defects in a self-assembled array of spherical block-copolymer microdomains, using topographical templates to control the local self-assembly.
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Formation of a Cobalt Magnetic Dot Array via Block Copolymer Lithography

TL;DR: In this paper, single-domain cobalt dot arrays with high magnetic particle density are fabricated by self-assembled block copolymer lithography, using a polystyrene-poly(ferrocenyldimethylsilane) copolymers as a template.
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Polymer self assembly in semiconductor microelectronics

TL;DR: Target applications including surface-roughening for on-chip decoupling capacitors, patterning nanocrystal floating gates for FLASH devices, and defining FET channel arrays are discussed.
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Fabrication of nanostructures with long-range order using block copolymer lithography

TL;DR: In this paper, a block copolymer self-assembly method is presented that allows ordered arrays of nanostructures to be formed by spin casting over surfaces patterned with shallow grooves.