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Kenji Saitoh

Researcher at Canon Inc.

Publications -  96
Citations -  1454

Kenji Saitoh is an academic researcher from Canon Inc.. The author has contributed to research in topics: Diffraction & Diffraction grating. The author has an hindex of 19, co-authored 95 publications receiving 1454 citations.

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Corner cube member illumination device and inspection system having the same

TL;DR: An illumination device has a light source that supplies illumination light to an object to be illuminated and also has a corner cube member disposed at the opposite side of the light source with respect to the object being illuminated as discussed by the authors.