K
Kenji Saitoh
Researcher at Canon Inc.
Publications - 96
Citations - 1454
Kenji Saitoh is an academic researcher from Canon Inc.. The author has contributed to research in topics: Diffraction & Diffraction grating. The author has an hindex of 19, co-authored 95 publications receiving 1454 citations.
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Patent
Positioning detecting method and apparatus
TL;DR: In this article, a photodetecting system was proposed to detect a relative positional relationship between first and second objects with respect to a predetermined direction, including an illumination system for irradiating the first object with light.
Patent
Inspection apparatus and method
Hiroshi Yoshikawa,Kenji Saitoh +1 more
TL;DR: In this paper, a captured image acquiring unit is configured to acquire a captured captured image that is acquired by shooting an inspection target, an acquiring unit configured to obtain from the captured image a first image region and a second image region whose intensity distributions of reflected light with respect to an incident angle of illumination light emitted to the inspection target are different.
Patent
Position detecting apparatus
Masanobu Hasegawa,Kenji Saitoh +1 more
TL;DR: In this article, a position detecting system for detecting relative positional relationship between first and second objects disposed opposed to each other is presented, which includes a first mark formed on the first object and provided by a physical optic element, a second mark created on the second object by an optical element, and an adjusting device for adjusting the position of incidence of the radiation beam upon the first one object on the basis of first signals detected by the light detecting portion.
Proceedings ArticleDOI
Challenging the limit of single mask exposure
TL;DR: In this article, it was shown that it is possible to simultaneously fabricate 110 nm (k 1 0.32) half-pitch dense and isolated contact hole patterns using Canon FPA-5000ES3 (KrF, NA equals 0.73).
Patent
Position detecting system
Masakazu Matsugu,Kenji Saitoh +1 more
TL;DR: In this article, a position detecting system for detecting the position of a substrate (1, 2) having a surface, with respect to first direction (Z) perpendicular to the surface of the substrate and a second direction perpendicular to Z, by use of a mark (3a, 4a) formed on the substrate having an optical power is disclosed.