L
L. Perraud
Researcher at University of Grenoble
Publications - 9
Citations - 34
L. Perraud is an academic researcher from University of Grenoble. The author has contributed to research in topics: Optical proximity correction & Engineering. The author has an hindex of 2, co-authored 7 publications receiving 29 citations.
Papers
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Proceedings ArticleDOI
Template affinity role in CH shrink by DSA planarization
Raluca Tiron,Ahmed Gharbi,P. Pimenta Barros,Shayma Bouanani,C. Lapeyre,Sandra Bos,Antoine Fouquet,Jerome Hazart,Xavier Chevalier,M. Argoud,G. Chamiot-Maitral,Sébastien Barnola,C. Monget,Vincent Farys,Sébastien Bérard-Bergery,L. Perraud,Christophe Navarro,C. Nicolet,Georges Hadziioannou,Guillaume Fleury +19 more
TL;DR: In this paper, the authors investigate the potential of DSA to address contact and via levels patterning with high resolution by performing either CD shrink or contact multiplication, and compare different DSA processes based on several success criteria such as: CD control, defectivity, and placement control.
Proceedings ArticleDOI
Study of SRAF placement for contact at 45 nm and 32 nm node
Vincent Farys,Frederic Robert,Catherine Martinelli,Yorick Trouiller,Frank Sundermann,C. Gardin,Jonathan Planchot,G. Kerrien,Florent Vautrin,Mazen Saied,Emek Yesilada,F. Foussadier,Alexandre Villaret,L. Perraud,B. Vandewalle,J. C. Le Denmat,Mame Kouna Top +16 more
TL;DR: This article proposes to study the placement of scatter-trenches assist features for the contact layer using process window simulation with different SRAF sizes and distance to the main OPC to establish the trends for size and placement.
Proceedings ArticleDOI
Roughness measurement of 2D curvilinear patterns: challenges and advanced methodology
Jonathan Pradelles,L. Perraud,Aurélien Fay,E. Sezestre,Jean-Baptiste Henry,Jessy Bustos,Estelle Guyez,Sébastien Bérard-Bergery,Aurélie Le Pennec,Mohamed Abaidi,Jordan Belissard,Nivea Schuch,Matthieu Milléquant,Thiago Figueiro,Patrick Schiavone +14 more
TL;DR: This article proposes to use a dedicated edge detection algorithm to measure LER of 2D curvilinear patterns on CD-SEM images with excellent correlation between the input roughness parameters and the measured parameters for both 1D and 2D synthetic images.
Proceedings ArticleDOI
Determining the validity domain of roughness measurements as a function of CD-SEM acquisition conditions
Mohamed Abaidi,Jordan Belissard,Nivea Schuch,Thiago Figueiro,Matthieu Milléquant,Jonathan Pradelles,L. Perraud,Jessy Bustos,Jean-Baptiste Henry,Estelle Guyez,Sébastien Bérard-Bergery,Patrick Schiavone +11 more
TL;DR: The goal of this study is to present the impact of the CD-SEM image acquisition conditions in the roughness measurement, and propose a method to determine the validity domain of the roughs measurements as a function of the acquisition conditions.
Proceedings ArticleDOI
193i lithography for contact doubling with grapho-epitaxy DSA: a simulation study
Antoine Fouquet,L. Perraud,Sébastien Bérard-Bergery,Ahmed Gharbi,Patricia Pimenta-Barros,Raluca Tiron,Jerome Hazart,Vincent Farys +7 more
TL;DR: In this paper, the impact of 193i scanner variations on BCP overlay for contact doubling was studied and a grapho-epitaxy combined with cylindrical BCP is a good candidate.