L
Lionel Buchaillot
Researcher at Centre national de la recherche scientifique
Publications - 121
Citations - 2200
Lionel Buchaillot is an academic researcher from Centre national de la recherche scientifique. The author has contributed to research in topics: Resonator & Microelectromechanical systems. The author has an hindex of 26, co-authored 121 publications receiving 2078 citations. Previous affiliations of Lionel Buchaillot include University of Valenciennes and Hainaut-Cambresis.
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Journal ArticleDOI
Gallium Nitride as an Electromechanical Material
Mina Rais-Zadeh,Vikrant J. Gokhale,Azadeh Ansari,Marc Faucher,Didier Theron,Yvon Cordier,Lionel Buchaillot +6 more
TL;DR: In this paper, the authors review the electromechanical, thermal, acoustic, and piezoelectric properties of GaN and describe the working principle of some of the reported high-performance GaN-based microelectromechanical components.
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Fabrication and characterization of an SU-8 gripper actuated by a shape memory alloy thin film
TL;DR: In this article, a shape memory alloy (SMA) thin film was constructed for a gripper made of SU-8 thick photoresist. But the performance of the gripper was limited to a force of 50 mN, corresponding to 400 μm of opening amplitude.
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Electrostatic actuated micro gripper using an amplification mechanism
Olivier Millet,Paul Bernardoni,Stephane Regnier,Philippe Bidaud,Elli Tsitsiris,Dominique Collard,Lionel Buchaillot +6 more
TL;DR: In this paper, a micro gripper using an amplification mechanism coupled to an electrostatic linear motor is presented, which is composed of scratch drive actuator inducing the use of electrostatic forces to obtain quasi-static motion for high accuracy in micropositioning.
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Silicon Nitride Thin Films Young's Modulus Determination by an Optical Non Destructive Method
TL;DR: In this article, the authors used commercially available atomic force microscopy (AFM) microcantilevers to determine the Young's modulus of silicon nitride (Si3N4) thin films.
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Variation of absorption coefficient and determination of critical dose of SU-8 at 365 nm
TL;DR: The absorption coefficient of SU-8 is observed to be time dependent during photolithographic exposure by I-line ultraviolet light (λ=365nm), varying linearly from 38±1cm−1 to 49±1 cm−1 for a surface exposure dose of 415mJ∕cm2 as mentioned in this paper.