N
Nicolas Ledermann
Researcher at École Polytechnique Fédérale de Lausanne
Publications - 27
Citations - 1126
Nicolas Ledermann is an academic researcher from École Polytechnique Fédérale de Lausanne. The author has contributed to research in topics: Thin film & Piezoelectric coefficient. The author has an hindex of 13, co-authored 27 publications receiving 1034 citations. Previous affiliations of Nicolas Ledermann include ULTra.
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Journal ArticleDOI
{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties
Nicolas Ledermann,Paul Muralt,J. Baborowski,S. Gentil,Kapil Mukati,Marco Cantoni,Andreas Seifert,Nava Setter +7 more
TL;DR: In this paper, the effective transverse piezoelectric coefficient e(31,f) of sol-gel processed films was investigated as a function of composition, film texture and film thickness.
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Piezoelectric micromachined ultrasonic transducers based on PZT thin films
Paul Muralt,Nicolas Ledermann,J. Paborowski,A. Barzegar,S. Gentil,B. Belgacem,Sylvain Petitgrand,Alain Bosseboeuf,Nava Setter +8 more
TL;DR: In this article, fabrication arid characterization results of piezoelectric micromachined ultrasonic transducers (pMUTs) based on 2-spl mu/m-thick Pb(Zr/sub 0.53/Ti/sub 3/) (PZT) thin films are described.
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Piezoelectric Pb(Zrx, Ti1−x)O3 thin film cantilever and bridge acoustic sensors for miniaturized photoacoustic gas detectors
Nicolas Ledermann,Nicolas Ledermann,Paul Muralt,J. Baborowski,Martin Forster,Jean-Paul Pellaux +5 more
TL;DR: In this article, highly sensitive piezoelectric acoustic sensors based on partially unclamped Pb(Zr-x, Ti1-x)O-3 (PZT) coated cantilever and bridge have been fabricated by silicon micromachining.
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Sputtered silicon carbide thin films as protective coating for MEMS applications
TL;DR: In this article, amorphous silicon carbide (SiC) thin films have been deposited by RF magnetron sputtering on hat surfaces and into micromachined cavities of Si (100).
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Piezoelectric cantilever microphone for photoacoustic gas detector
Nicolas Ledermann,J. Baborowski,Andreas Seifert,Bert Willing,Stephane Hiboux,Paul Muralt,Nava Setter,Martin Dr. Forster +7 more
TL;DR: In this paper, a micromachined pressure sensor based on PZT coated silicon cantilevers has been fabricated and integrated in a photoacoustic gas detector, achieving a high response of 150 mV/Pa with a S/N of 700 at 1 Pa and 1 Hz bandwidth.