P
Paul Muralt
Researcher at École Polytechnique Fédérale de Lausanne
Publications - 345
Citations - 13849
Paul Muralt is an academic researcher from École Polytechnique Fédérale de Lausanne. The author has contributed to research in topics: Thin film & Piezoelectricity. The author has an hindex of 54, co-authored 344 publications receiving 12694 citations. Previous affiliations of Paul Muralt include École Polytechnique & ETH Zurich.
Papers
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Thin Film Piezoelectrics for MEMS
TL;DR: In this article, the authors reviewed the literature in this field, with an emphasis on the factors that impact the magnitude of the available piezoelectric response for non-ferroelectric materials such as ZnO and AlN.
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Ferroelectric thin films for micro-sensors and actuators: a review
TL;DR: In this article, the authors present a review of the deposition, integration, and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems.
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Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications
M.-A. Dubois,Paul Muralt +1 more
TL;DR: In this paper, a thin-film bulk acoustic resonator (TFBAR) with fundamental resonance at 3.6 GHz has been fabricated to assess resonator properties, and the material parameters derived from the thickness resonance were a coupling factor k=0.23 and a sound velocity vs.
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{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties
Nicolas Ledermann,Paul Muralt,J. Baborowski,S. Gentil,Kapil Mukati,Marco Cantoni,Andreas Seifert,Nava Setter +7 more
TL;DR: In this paper, the effective transverse piezoelectric coefficient e(31,f) of sol-gel processed films was investigated as a function of composition, film texture and film thickness.
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PZT thin films for microsensors and actuators: Where do we stand?
TL;DR: This paper reviews deposition, integration, and device fabrication of PbZr/sub x/Ti/sub 1-x/O/sub 3/ (PZT) films for applications in micro-electromechanical systems and some preliminary conclusions are presented.