P
P. Lyan
Researcher at French Alternative Energies and Atomic Energy Commission
Publications - 2
Citations - 423
P. Lyan is an academic researcher from French Alternative Energies and Atomic Energy Commission. The author has contributed to research in topics: Photolithography & Silicon photonics. The author has an hindex of 2, co-authored 2 publications receiving 422 citations.
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Journal Article
Characterization of buried photonic crystal waveguides and microcavities fabricated by deep ultraviolet lithography
Iwan Märki,Martin Salt,Hans Peter Herzig,R. P. Stanley,L. El Melhaoui,P. Lyan,Jean-Marc Fedeli +6 more
TL;DR: In this paper, the optical characterization of silicon photonic crystal waveguides and microcavities that are completely buried in a silicon dioxide cladding and are fabricated by deep ultraviolet (UV) lithography is discussed.
Journal ArticleDOI
Characterization of buried photonic crystal waveguides and microcavities fabricated by deep ultraviolet lithography
Iwan Märki,Martin Salt,Hans Peter Herzig,R. P. Stanley,L. El Melhaoui,P. Lyan,Jean-Marc Fedeli +6 more
TL;DR: In this article, the optical characterization of silicon photonic crystal waveguides and microcavities that are completely buried in a silicon dioxide cladding and are fabricated by deep ultraviolet (UV) lithography is discussed.