S
S. Ramanathan
Researcher at Indian Institute of Technology Madras
Publications - 36
Citations - 1655
S. Ramanathan is an academic researcher from Indian Institute of Technology Madras. The author has contributed to research in topics: Chemical-mechanical planarization & Copper. The author has an hindex of 17, co-authored 35 publications receiving 1316 citations.
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Effect of lanthanum doping in ceria abrasives on chemical mechanical polishing selectivity for shallow trench isolation
TL;DR: In this paper, two different ceria abrasives were evaluated in order to identify the nature of interaction between the additives and the abrasives, and the results showed that the extent of adsorption of glycine or proline on ceria depends on the presence of La doping.
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Role of Amino-Acid Adsorption on Silica and Silicon Nitride Surfaces during STI CMP
Y. Nagendra Prasad,S. Ramanathan +1 more
TL;DR: In this article, the role of adsorption of the amino acids L-proline and L-arginine on silicon dioxide and silicon nitride surfaces was characterized as a function of pH and concentration using thermogravimetric analysis.
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Electrochemical impedance spectroscopic studies of copper dissolution in glycine–hydrogen peroxide solutions
TL;DR: In this article, anodic dissolution of copper in glycine solution at various hydrogen peroxide concentrations was investigated, and the dissolution rate increases, reaches a maximum, and then decreases with hydrogenperoxide concentration.
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Abrasive and additive interactions in high selectivity STI CMP slurries
TL;DR: In this article, the additive abrasive interactions were evaluated by UV-Visible spectroscopy and inductively coupled plasma optical emission spectrography (ICP-OES) analysis.