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Satoshi Nagai

Researcher at Toshiba

Publications -  113
Citations -  911

Satoshi Nagai is an academic researcher from Toshiba. The author has contributed to research in topics: Ultrasonic sensor & Signal. The author has an hindex of 15, co-authored 113 publications receiving 891 citations.

Papers
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Patent

Ultrasonic wave probe

TL;DR: In this paper, a back loading material that improves ultrasonic wave transmitting and receiving performance was used to improve the accuracy of movement of vibrating elements by attaching a coating material of a specified thickness to the vibrating element.
Patent

Exposure apparatus, exposure method and manufacturing method of semiconductor device

TL;DR: In this article, a resist film formed on a processing layer is exposed by irradiating exposure light with a first wavelength belonging to an EUV band and auxiliary light having a second wavelength different from the first wavelength, the auxiliary light being separately generated from the exposure light.
Patent

Ultrasonic flaw detector, method and program

TL;DR: In this article, an ultrasonic flaw detection technique for executing position measurement and sizing of an internal flaw of a welded portion with high accuracy is proposed, which includes a transmission section 20 for transmitting ultrasonic beam Ba at a predetermined transmission angle θt from a transmission point 23 of a first base metal 43a to a welding portion 41 at a reception point 33 of a second base metal43b.
Patent

Semiconductor device, manufacturing method for a semiconductor device, and nontransitory computer readable medium storing a pattern generating program

TL;DR: In this paper, a semiconductor device includes a stacked body of N (N is an integer of 2 or more) layers stacked on a substrate and openings different in depth surrounded by the stacked body and separated from each other.