S
Satoshi Nagai
Researcher at Toshiba
Publications - 113
Citations - 911
Satoshi Nagai is an academic researcher from Toshiba. The author has contributed to research in topics: Ultrasonic sensor & Signal. The author has an hindex of 15, co-authored 113 publications receiving 891 citations.
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Patent
Probe and ultrasonic wave flaw detecting method
TL;DR: In this article, the defect in the vicinity of a surface layer part of a body to be checked highly efficiently, by the constitution wherein one vibrator is made to be a wave transmitting vibrator to which a refraction angle setting body is attached, and a vibrator group other than the above-mentioned vibrator was used as a wave receiving vibrator groups.
Patent
Ultrasonic test equipment and ultrasonic flaw detection method
Takahiro Miura,Yamamoto Setsu,Makoto Ochiai,Takeshi Hoshi,Watabe Kazumi,Satoshi Nagai,Masahiro Yoshida,Hiroyuki Adachi,Mihashi Tadahiro,Satoshi Yamamoto +9 more
TL;DR: In this paper, an ultrasonic test equipment with which the detection result can be obtained with high accuracy even if the surface of an object to be inspected is formed to have complicated shape.
Proceedings ArticleDOI
Immersion resist process for 32-nm node logic devices
Tatsuhiko Ema,Koutarou Sho,Hiroki Yonemitsu,Yuriko Seino,Hiroharu Fujise,Akiko Yamada,Shoji Mimotogi,Yosuke Kitamura,Satoshi Nagai,Kotaro Fujii,Fukushima Takashi,Toshiaki Komukai,Akiko Nomachi,Tsukasa Azuma,Shinichi Ito +14 more
TL;DR: In this paper, a new spin-on-carbon (SOC) material without any deformation during etch process was successfully developed for 32nm node stacked mask process (SMAP).
Patent
Electromagnetic flaw detecting equipment
TL;DR: In this article, the electromagnetic flaw detecting equipment comprises a probe 1 for detecting the variation of eddy current being induced in an object 5 to be inspected by applying magnetic field thereto, a section 3 for detecting a flaw on the object 5 based on an output from the probe 1, and a section 4 for displaying/recording a signal received from the detecting section 3.
Patent
Ultrasonic flaw detection device and method
Yamamoto Setsu,Chihoshi Atsushi,Junichi Takabayashi,Makoto Ochiai,Mihashi Tadahiro,Satoshi Nagai,Hiroyuki Adachi,Satoshi Yamamoto +7 more
TL;DR: In this paper, an ultrasonic flaw detection device consisting of a potential difference applying unit 12 that applies potential difference having any waveform to a probe 11, a drive element switching unit 22 that selectively switches to a piezoelectric element 21 for applying the potential difference, an AD converting unit 23 that acquires waveform data from a signal obtained from each PEG element 21, a surface shape acquiring unit 27 that acquired surface shape data of an inspection object 2, and a delay-time calculating unit 29 that calculates a delay time of ultrasonic transmission and reception for obtaining