S
Stefan E. Schulz
Researcher at Fraunhofer Society
Publications - 240
Citations - 2508
Stefan E. Schulz is an academic researcher from Fraunhofer Society. The author has contributed to research in topics: Carbon nanotube & Dielectric. The author has an hindex of 22, co-authored 235 publications receiving 2144 citations. Previous affiliations of Stefan E. Schulz include Helmholtz-Zentrum Dresden-Rossendorf & Chemnitz University of Technology.
Papers
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Journal ArticleDOI
Synthesis of β-Ketoiminato Copper(II) Complexes and Their Use in Copper Deposition
Andrea Preuß,Marcus Korb,Tobias Rüffer,Jörn Bankwitz,Colin Georgi,Alexander Jakob,Stefan E. Schulz,Stefan E. Schulz,Heinrich Lang +8 more
Journal ArticleDOI
Interface reactions between CVD and PVD tungsten and aluminium
TL;DR: In this article, a diffusion of aluminium into tungsten was proved in all investigated layer combinations and an amorphous Al-F compound was detected at the interface of CVD-W deposited by silane reduction of WF 6 and AlSi.
Proceedings ArticleDOI
Investigation of barrier formation and stability of self-forming barriers with CuMn, CuTi and CuZr alloys
TL;DR: In this paper, the authors present the recent work on self-forming barriers and its stability against copper diffusion and show that these alloys are capable to form an enrichment layer on the SiO 2 interface.
Journal ArticleDOI
Evaluation of air gap structures produced by wet etch of sacrificial dielectrics: Extraction of keff for different technology nodes and film permittivity
TL;DR: In this paper, two approaches of air gap formation using wet etch back of sacrificial PECVD SiO"2 dielectrics were evaluated concerning their achievable effective k-values.
Journal ArticleDOI
Different SiH4 treatments of CVD TiN barrier layers
TL;DR: In this paper, a cyclic MOCVD TiN deposition process of alternating deposition and plasma treatment steps was modified to deposit Si stabilized TiN barriers for copper metallisation schemes.