S
Stefan E. Schulz
Researcher at Fraunhofer Society
Publications - 240
Citations - 2508
Stefan E. Schulz is an academic researcher from Fraunhofer Society. The author has contributed to research in topics: Carbon nanotube & Dielectric. The author has an hindex of 22, co-authored 235 publications receiving 2144 citations. Previous affiliations of Stefan E. Schulz include Helmholtz-Zentrum Dresden-Rossendorf & Chemnitz University of Technology.
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Thermal stability and gap-fill properties of spin-on MSQ low-k dielectrics
TL;DR: In this article, two MSQ-based spin-on dielectrics, a porous ultralow-k material and a dense spinon glass, were evaluated for their thermal stability and gap-fill behaviour.
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Carbon nanotube based via interconnects: Performance estimation based on the resistance of individual carbon nanotubes
Holger Fiedler,Marius Toader,Sascha Hermann,Raul D. Rodriguez,Evgeniya Sheremet,M. Rennau,Steffen Schulze,Thomas Waechtler,Thomas Waechtler,Michael Hietschold,Dietrich R. T. Zahn,Stefan E. Schulz,Stefan E. Schulz,Thomas Gessner,Thomas Gessner +14 more
TL;DR: In this paper, a carbon nanotube (CNT) based interconnects with an improved bottom metallization scheme were prepared and characterized and the resistance of individual CNTs was measured by means of conductive atomic force microscopy (cAFM).
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Wafer-level decoration of carbon nanotubes in field-effect transistor geometry with preformed gold nanoparticles using a microfluidic approach
TL;DR: In this paper, a scalable on-chip functionalization of single-walled carbon nanotubes (SWCNTs) between palladium electrodes in the geometry of a field-effect transistor with preformed metallic nanoparticles is reported.
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Conductive AFM for CNT characterization
Marius Toader,Holger Fiedler,Sascha Hermann,Stefan E. Schulz,Stefan E. Schulz,Thomas Gessner,Thomas Gessner,Michael Hietschold +7 more
TL;DR: Voltage-dependent current mapping and current–voltage characteristics recorded down to single CNT allow for a comprehensive insight into the electric behaviour of the hybrid structure.