S
Stefan E. Schulz
Researcher at Fraunhofer Society
Publications - 240
Citations - 2508
Stefan E. Schulz is an academic researcher from Fraunhofer Society. The author has contributed to research in topics: Carbon nanotube & Dielectric. The author has an hindex of 22, co-authored 235 publications receiving 2144 citations. Previous affiliations of Stefan E. Schulz include Helmholtz-Zentrum Dresden-Rossendorf & Chemnitz University of Technology.
Papers
More filters
Patent
Layer system having a layer of carbon nanotubes arranged parallel to one another and an electrically conductive surface layer, method for producing the layer system, and use of the layer system in microsystem technology
TL;DR: In this paper, the authors proposed a layer system, which consists of a layer of carbon nanotubes oriented parallel to one another and a surface layer having metallic properties connected directly to them.
Journal ArticleDOI
Influence of the additives argon, O2, C4F8, H2, N2 and CO on plasma conditions and process results during the etch of SiCOH in CF4 plasma
Sven Zimmermann,Nicole Ahner,F. Blaschta,Matthias Schaller,H. Zimmermann,H. Rülke,Norbert Lang,J Röpcke,Stefan E. Schulz,Thomas Gessner +9 more
TL;DR: In this paper, the additive gases Ar, O"2, C"4F"8, H 2, N 2 and CO were added to a conventional CF"4 etch plasma.
Journal ArticleDOI
SiO2 aerogel ultra low k dielectric patterning using different hard mask concepts and stripping processes
TL;DR: In this article, the patterning of porous SiO"2 aerogel as ultra low k dielectric has been investigated and three different concepts were examined to etch this material without damage and to finally integrate it into a copper damascene metallization.
Journal ArticleDOI
Spectroscopic ellipsometry and magneto-optical Kerr effect spectroscopy study of thermally treated Co60Fe20B20 thin films.
Maria A. Hoffmann,Apoorva Sharma,Patrick Matthes,Shun Okano,Olav Hellwig,Olav Hellwig,Ramona Ecke,Dietrich R. T. Zahn,Georgeta Salvan,Stefan E. Schulz,Stefan E. Schulz +10 more
TL;DR: The spectral dependence of the dielectric tensor is derived from experimental data for samples prior and after annealing in vacuum and can be ascribed to an increase of the crystalline ordering of the CoFeB.
Journal ArticleDOI
Experimental and computational studies on the role of surface functional groups in the mechanical behavior of interfaces between single-walled carbon nanotubes and metals
Steffen Hartmann,Heinz Sturm,Thomas Blaudeck,Ole Holck,Sascha Hermann,Stefan E. Schulz,Thomas Gessner,Bernhard Wunderle +7 more
TL;DR: In this article, the authors studied the mechanical interface behavior of single-walled carbon nanotubes (CNTs) embedded in a noble metal and performed CNT-metal pull-out tests with in situ scanning electron microscope experiments.