T
Tero Pilvi
Researcher at University of Helsinki
Publications - 21
Citations - 828
Tero Pilvi is an academic researcher from University of Helsinki. The author has contributed to research in topics: Atomic layer deposition & Thin film. The author has an hindex of 13, co-authored 21 publications receiving 774 citations.
Papers
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Journal ArticleDOI
Zone-doubling technique to produce ultrahigh-resolution x-ray optics.
TL;DR: A method for the fabrication of ultrahigh-resolution Fresnel zone plate lenses for x-ray microscopy is demonstrated based on the deposition of a zone plate material onto the sidewalls of a prepatterned template structure using an atomic layer deposition technique, which results in a doubling of the effective zone density.
Journal ArticleDOI
Advanced thin film technology for ultrahigh resolution X-ray microscopy.
Joan Vila-Comamala,Konstantins Jefimovs,Jörg Raabe,Tero Pilvi,Rainer H. Fink,Mathias Senoner,A. Maassdorf,Mikko Ritala,Christian David +8 more
TL;DR: F Fresnel zone plates were fabricated by combining electron-beam lithography with atomic layer deposition and focused ion beam induced deposition and for the first time in X-ray microscopy, features below 10nm in width were resolved.
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Novel ALD process for depositing CaF2 thin films
TL;DR: In this article, thin films of calcium fluoride were deposited by atomic layer deposition (ALD) at a temperature range of 300−450 °C using TiF4 as a new convenient fluoride precursor.
Journal ArticleDOI
Study of a novel ALD process for depositing MgF2 thin films
Tero Pilvi,Timo Hatanpää,Esa Puukilainen,Kai Arstila,Martin Bischoff,Ute Kaiser,Norbert Kaiser,Markku Leskelä,Mikko Ritala +8 more
TL;DR: In this article, a novel atomic layer deposition (ALD) process for depositing magnesium fluoride thin films for the first time was developed, and the films were polycrystalline at 250-400 °C.
Journal ArticleDOI
Atomic layer deposition of hafnium dioxide thin films from hafnium tetrakis(dimethylamide) and water
TL;DR: In this article, HfO 2 films were grown by atomic layer deposition from Hf[N(CH 3 ) 2 ] 4 and H 2 O on Si(100) substrates in the temperature range of 205-400 °C.