Showing papers by "Thomas H. Kuehn published in 1988"
TL;DR: The Revue des publications en langue anglaise dans le domaine du transfert de chaleur, pour l'annee 1987 as mentioned in this paper, for l'Annee 1987
19 citations
TL;DR: A review of existing airflow and particle transport simulation methods is presented and some recent applications to cleanroom airflow prediction are described in this paper, where the advantages of computer simulation over experimental measurements and limitations are discussed, and future directions of cleanroom modeling are presented.
Abstract: Numerical procedures are well developed for simulating simple fluid flows and associated heat and mass transfer processes. Steady isothermal airflow in either a vertical laminar flow cleanroom or a tunnel cleanroom can be predicted accurately by using currently available simulation codes. The effects of items such as shields, process equipment, robot components, and bench design on the cleanroom airflow can be investigated by performing simulation experiments on a computer rather than physical experiments on a mockup. Design and operating parameters can be readily varied in the simulation to demonstrate their influence on the cleanroom performance. A review of existing airflow and particle transport simulation methods is presented and some recent applications to cleanroom airflow prediction are described. Advantages of computer simulation over experimental measurements and limitations are discussed, and future directions of cleanroom modeling are presented.
15 citations
TL;DR: In this paper, numerical flow and particle transport modeling is used to facilitate the design and operation of clean environments, and experimental data from an operating clean room and theoretical predictions indicate that the model is sufficiently accurate to predict the main features of the flow features for various configurations and operating conditions.
13 citations
11 Jul 1988
6 citations