U
U. Cao-Minh
Researcher at Fraunhofer Society
Publications - 1
Citations - 104
U. Cao-Minh is an academic researcher from Fraunhofer Society. The author has contributed to research in topics: Microelectronics & Wafer bonding. The author has an hindex of 1, co-authored 1 publications receiving 99 citations.
Papers
More filters
Journal ArticleDOI
Three dimensional metallization for vertically integrated circuits
D. Bollmann,R. Braun,R. Buchner,U. Cao-Minh,Manfred Engelhardt,G. Errmann,T. Grassl,K. Hieber,H. Hübner,G. Kawala,M.B. Kleiner,Armin Klumpp,S.A. Kuhn,Christof Landesberger,H. Lezec,W. Muth,Werner Pamler,R. Popp,E. Renner,G. Ruhl,A. Sanger,U. Scheler,C. Schmidt,Siegfried Dr. Rer. Nat. Schwarzl,Josef Weber,Werner Weber,Peter Ramm +26 more
TL;DR: In this article, the authors realized a three dimensional metallization for vertically integrated circuits (VIC) using a newly developed technology that allows stacking and vertical interchip wiring of completely processed and electrically tested wafers using available microelectronic processes.